Carbon nanotubes synthesized by plasma enhanced CVD: Preparation for measurements of their electrical properties for application in pressure sensor

Richard Ficek, Radimír Vrba, Bo Hyun Kim, Stephen Goodnick, Srdjan Milicic, Zuzana Kučerova, Lenka Zajíčkova, Marek Eliáš

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Carbon nanotubes (CNTs) were synthesized in atmospheric pressure microwave plasma torch in the mixture of argon, methane and hydrogen on the silicon substrate with SiO2 overlayer and a thin top iron film serving as a catalyst. This deposition technique is unique because of its simplicity and high CNT growth rate but it is still under investigation as concerns exits around its reproducibility. CNTs were deposited with the future prospect of their applications or further characterization that might require CNTs in the form of suspension or powder. One of the research directions includes measurements of CNT electrical properties such as their current-voltage (I-V) characteristics. Preparation of solutions with well dispersed CNTs was studied using various liquids (distilled water, ethyl alcohol) and ultrasonication. Dried drops of these solutions were investigated by scanning electron microscopy (SEM) and atomic force microscopy (AFM) in order to assess CNT appearance and dispersion. Electrical measurement chips with gold electrodes were prepared by electron lithography. CNTs were placed on the chips by dropping their solution and the I-V characteristics may be measured by contacting the electrodes bridged by CNTs.

Original languageEnglish (US)
Title of host publication2006 International Symposium on Communications and Information Technologies, ISCIT
Pages857-860
Number of pages4
DOIs
StatePublished - 2006
Event2006 International Symposium on Communications and Information Technologies, ISCIT - Bangkok, Thailand
Duration: Oct 18 2006Oct 20 2006

Other

Other2006 International Symposium on Communications and Information Technologies, ISCIT
CountryThailand
CityBangkok
Period10/18/0610/20/06

Fingerprint

Pressure sensors
Plasma enhanced chemical vapor deposition
Carbon nanotubes
Electric properties
Plasma torches
Electrodes
Electron beam lithography
Atmospheric pressure
Argon
Atomic force microscopy
Methane
Ethanol
Gold
Microwaves
Iron
Powders
Silicon
Hydrogen
Scanning electron microscopy
Catalysts

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Ficek, R., Vrba, R., Kim, B. H., Goodnick, S., Milicic, S., Kučerova, Z., ... Eliáš, M. (2006). Carbon nanotubes synthesized by plasma enhanced CVD: Preparation for measurements of their electrical properties for application in pressure sensor. In 2006 International Symposium on Communications and Information Technologies, ISCIT (pp. 857-860). [4141337] https://doi.org/10.1109/ISCIT.2006.339858

Carbon nanotubes synthesized by plasma enhanced CVD : Preparation for measurements of their electrical properties for application in pressure sensor. / Ficek, Richard; Vrba, Radimír; Kim, Bo Hyun; Goodnick, Stephen; Milicic, Srdjan; Kučerova, Zuzana; Zajíčkova, Lenka; Eliáš, Marek.

2006 International Symposium on Communications and Information Technologies, ISCIT. 2006. p. 857-860 4141337.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ficek, R, Vrba, R, Kim, BH, Goodnick, S, Milicic, S, Kučerova, Z, Zajíčkova, L & Eliáš, M 2006, Carbon nanotubes synthesized by plasma enhanced CVD: Preparation for measurements of their electrical properties for application in pressure sensor. in 2006 International Symposium on Communications and Information Technologies, ISCIT., 4141337, pp. 857-860, 2006 International Symposium on Communications and Information Technologies, ISCIT, Bangkok, Thailand, 10/18/06. https://doi.org/10.1109/ISCIT.2006.339858
Ficek R, Vrba R, Kim BH, Goodnick S, Milicic S, Kučerova Z et al. Carbon nanotubes synthesized by plasma enhanced CVD: Preparation for measurements of their electrical properties for application in pressure sensor. In 2006 International Symposium on Communications and Information Technologies, ISCIT. 2006. p. 857-860. 4141337 https://doi.org/10.1109/ISCIT.2006.339858
Ficek, Richard ; Vrba, Radimír ; Kim, Bo Hyun ; Goodnick, Stephen ; Milicic, Srdjan ; Kučerova, Zuzana ; Zajíčkova, Lenka ; Eliáš, Marek. / Carbon nanotubes synthesized by plasma enhanced CVD : Preparation for measurements of their electrical properties for application in pressure sensor. 2006 International Symposium on Communications and Information Technologies, ISCIT. 2006. pp. 857-860
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