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Carbon Enhanced Vapor Etching For Pattern Development In Integrated Circuits
Michael Kozicki
(Inventor)
Arizona State University
Research output
:
Patent
Overview
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Dive into the research topics of 'Carbon Enhanced Vapor Etching For Pattern Development In Integrated Circuits'. Together they form a unique fingerprint.
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Engineering & Materials Science
Etching
100%
Integrated circuits
85%
Vapors
83%
Carbon
70%
Fabrication
68%
Ultraviolet radiation
60%
Image resolution
49%
Silica
47%
Coatings
34%
Data storage equipment
28%