Abstract
This paper presents a comprehensive framework for the strategic capacity expansion of production equipment in semiconductor manufacturing, and the proposed approach is applied to a model of an actual wafer fabrication facility. It is the intention of this work to show that, once intelligently integrated, an analytical queueing model and a numeric computer simulation model can be used synergistically and can lead to a better alternative method than methods restricted to only one of them. The outcome of our methods is a number of good system configurations, each of which is characterised by its cycle time (CT)-throughput (TH) profile. Such profiles fully describe the system's comprehensive performance over a wide range of demand scenarios (involving varying product mix), and hence can be used to thoroughly evaluate alternative configurations in capacity expansion decisions.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 4573-4591 |
| Number of pages | 19 |
| Journal | International Journal of Production Research |
| Volume | 49 |
| Issue number | 15 |
| DOIs | |
| State | Published - Aug 1 2011 |
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Keywords
- batch scheduling
- capacity planning
- discrete event simulation
- scheduling
- semiconductor manufacture
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering
- Management Science and Operations Research
- Strategy and Management
Cite this
Capacity planning through queueing analysis and simulation-based statistical methods : A case study for semiconductor wafer fabs. / Liu, Jingang; Yang, Feng; Wan, Hong; Fowler, John.
In: International Journal of Production Research, Vol. 49, No. 15, 01.08.2011, p. 4573-4591.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Capacity planning through queueing analysis and simulation-based statistical methods
T2 - A case study for semiconductor wafer fabs
AU - Liu, Jingang
AU - Yang, Feng
AU - Wan, Hong
AU - Fowler, John
PY - 2011/8/1
Y1 - 2011/8/1
N2 - This paper presents a comprehensive framework for the strategic capacity expansion of production equipment in semiconductor manufacturing, and the proposed approach is applied to a model of an actual wafer fabrication facility. It is the intention of this work to show that, once intelligently integrated, an analytical queueing model and a numeric computer simulation model can be used synergistically and can lead to a better alternative method than methods restricted to only one of them. The outcome of our methods is a number of good system configurations, each of which is characterised by its cycle time (CT)-throughput (TH) profile. Such profiles fully describe the system's comprehensive performance over a wide range of demand scenarios (involving varying product mix), and hence can be used to thoroughly evaluate alternative configurations in capacity expansion decisions.
AB - This paper presents a comprehensive framework for the strategic capacity expansion of production equipment in semiconductor manufacturing, and the proposed approach is applied to a model of an actual wafer fabrication facility. It is the intention of this work to show that, once intelligently integrated, an analytical queueing model and a numeric computer simulation model can be used synergistically and can lead to a better alternative method than methods restricted to only one of them. The outcome of our methods is a number of good system configurations, each of which is characterised by its cycle time (CT)-throughput (TH) profile. Such profiles fully describe the system's comprehensive performance over a wide range of demand scenarios (involving varying product mix), and hence can be used to thoroughly evaluate alternative configurations in capacity expansion decisions.
KW - batch scheduling
KW - capacity planning
KW - discrete event simulation
KW - scheduling
KW - semiconductor manufacture
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U2 - 10.1080/00207543.2010.501828
DO - 10.1080/00207543.2010.501828
M3 - Article
AN - SCOPUS:79959237407
VL - 49
SP - 4573
EP - 4591
JO - International Journal of Production Research
JF - International Journal of Production Research
SN - 0020-7543
IS - 15
ER -