Abstract
This paper presents a comprehensive framework for the strategic capacity expansion of production equipment in semiconductor manufacturing, and the proposed approach is applied to a model of an actual wafer fabrication facility. It is the intention of this work to show that, once intelligently integrated, an analytical queueing model and a numeric computer simulation model can be used synergistically and can lead to a better alternative method than methods restricted to only one of them. The outcome of our methods is a number of good system configurations, each of which is characterised by its cycle time (CT)-throughput (TH) profile. Such profiles fully describe the system's comprehensive performance over a wide range of demand scenarios (involving varying product mix), and hence can be used to thoroughly evaluate alternative configurations in capacity expansion decisions.
Original language | English (US) |
---|---|
Pages (from-to) | 4573-4591 |
Number of pages | 19 |
Journal | International Journal of Production Research |
Volume | 49 |
Issue number | 15 |
DOIs | |
State | Published - Aug 1 2011 |
Keywords
- batch scheduling
- capacity planning
- discrete event simulation
- scheduling
- semiconductor manufacture
ASJC Scopus subject areas
- Strategy and Management
- Management Science and Operations Research
- Industrial and Manufacturing Engineering