Abstract

This paper presents a comprehensive framework for the strategic capacity expansion of production equipment in semiconductor manufacturing, and the proposed approach is applied to a model of an actual wafer fabrication facility. It is the intention of this work to show that, once intelligently integrated, an analytical queueing model and a numeric computer simulation model can be used synergistically and can lead to a better alternative method than methods restricted to only one of them. The outcome of our methods is a number of good system configurations, each of which is characterised by its cycle time (CT)-throughput (TH) profile. Such profiles fully describe the system's comprehensive performance over a wide range of demand scenarios (involving varying product mix), and hence can be used to thoroughly evaluate alternative configurations in capacity expansion decisions.

Original languageEnglish (US)
Pages (from-to)4573-4591
Number of pages19
JournalInternational Journal of Production Research
Volume49
Issue number15
DOIs
StatePublished - Aug 1 2011

Fingerprint

Statistical methods
Semiconductor materials
Planning
Throughput
Fabrication
Computer simulation
Semiconductors
Capacity planning
Queueing
Simulation
Capacity expansion
Semiconductor manufacturing
Integrated
Product mix
Wafer fabrication
Simulation model
Scenarios
Queueing model
Cycle time

Keywords

  • batch scheduling
  • capacity planning
  • discrete event simulation
  • scheduling
  • semiconductor manufacture

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Management Science and Operations Research
  • Strategy and Management

Cite this

Capacity planning through queueing analysis and simulation-based statistical methods : A case study for semiconductor wafer fabs. / Liu, Jingang; Yang, Feng; Wan, Hong; Fowler, John.

In: International Journal of Production Research, Vol. 49, No. 15, 01.08.2011, p. 4573-4591.

Research output: Contribution to journalArticle

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