13 Scopus citations

Abstract

This paper presents a comprehensive framework for the strategic capacity expansion of production equipment in semiconductor manufacturing, and the proposed approach is applied to a model of an actual wafer fabrication facility. It is the intention of this work to show that, once intelligently integrated, an analytical queueing model and a numeric computer simulation model can be used synergistically and can lead to a better alternative method than methods restricted to only one of them. The outcome of our methods is a number of good system configurations, each of which is characterised by its cycle time (CT)-throughput (TH) profile. Such profiles fully describe the system's comprehensive performance over a wide range of demand scenarios (involving varying product mix), and hence can be used to thoroughly evaluate alternative configurations in capacity expansion decisions.

Original languageEnglish (US)
Pages (from-to)4573-4591
Number of pages19
JournalInternational Journal of Production Research
Volume49
Issue number15
DOIs
StatePublished - Aug 1 2011

Keywords

  • batch scheduling
  • capacity planning
  • discrete event simulation
  • scheduling
  • semiconductor manufacture

ASJC Scopus subject areas

  • Strategy and Management
  • Management Science and Operations Research
  • Industrial and Manufacturing Engineering

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