Calibration of projector lens distortions

F. Hüe; C. L. Johnson; S. Lartigue-Korinek; G. Wang; P R Buseck; M. J. Hÿtch

doi:10.1093/jmicro/dfi042

Calibration of projector lens distortions

F. Hüe, C. L. Johnson, S. Lartigue-Korinek, G. Wang, P R Buseck, M. J. Hÿtch

Research output: Contribution to journal › Article › peer-review

64 Scopus citations

Abstract

The distortions introduced into high-resolution transmission electron microscope (HRTEM) images by the projector lens system are an important source of systematic error for quantitative displacement and strain determination. Using geometric phase analysis of images of perfect crystals, we measured these errors for two different transmission electron microscopes. Local magnification varies by as much as 5%, and rotation can reach 2° across a typical image. Our experimental results are compared with theory, and optical pincushion and spiral distortion coefficients are determined. A method for calibrating and removing these distortions is presented that enables quantification to 0.1% strain and 0.1° rotation across the whole field of view. This calibration is also critical for the accurate measurement of local lattice parameters from HRTEM images.

Original language	English (US)
Pages (from-to)	181-190
Number of pages	10
Journal	Journal of Electron Microscopy
Volume	54
Issue number	3
DOIs	https://doi.org/10.1093/jmicro/dfi042
State	Published - Jun 2005

Keywords

Geometric phase
HRTEM
Lattice parameter determination
Optical distortions
Projector lens
Strain

ASJC Scopus subject areas

Instrumentation

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10.1093/jmicro/dfi042

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@article{f71ab31336d54390be0e84162050cf77,

title = "Calibration of projector lens distortions",

abstract = "The distortions introduced into high-resolution transmission electron microscope (HRTEM) images by the projector lens system are an important source of systematic error for quantitative displacement and strain determination. Using geometric phase analysis of images of perfect crystals, we measured these errors for two different transmission electron microscopes. Local magnification varies by as much as 5%, and rotation can reach 2° across a typical image. Our experimental results are compared with theory, and optical pincushion and spiral distortion coefficients are determined. A method for calibrating and removing these distortions is presented that enables quantification to 0.1% strain and 0.1° rotation across the whole field of view. This calibration is also critical for the accurate measurement of local lattice parameters from HRTEM images.",

keywords = "Geometric phase, HRTEM, Lattice parameter determination, Optical distortions, Projector lens, Strain",

author = "F. H{\"u}e and Johnson, {C. L.} and S. Lartigue-Korinek and G. Wang and Buseck, {P R} and H{\"y}tch, {M. J.}",

note = "Funding Information: Partial financial support (for C.L.J. and P.R.B.) was provided by the National Science Foundation grant EAR-0003533.",

year = "2005",

month = jun,

doi = "10.1093/jmicro/dfi042",

language = "English (US)",

volume = "54",

pages = "181--190",

journal = "Journal of Electron Microscopy",

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publisher = "Japanese Society of Microscopy",

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TY - JOUR

T1 - Calibration of projector lens distortions

AU - Hüe, F.

AU - Johnson, C. L.

AU - Lartigue-Korinek, S.

AU - Wang, G.

AU - Buseck, P R

AU - Hÿtch, M. J.

N1 - Funding Information: Partial financial support (for C.L.J. and P.R.B.) was provided by the National Science Foundation grant EAR-0003533.

PY - 2005/6

Y1 - 2005/6

N2 - The distortions introduced into high-resolution transmission electron microscope (HRTEM) images by the projector lens system are an important source of systematic error for quantitative displacement and strain determination. Using geometric phase analysis of images of perfect crystals, we measured these errors for two different transmission electron microscopes. Local magnification varies by as much as 5%, and rotation can reach 2° across a typical image. Our experimental results are compared with theory, and optical pincushion and spiral distortion coefficients are determined. A method for calibrating and removing these distortions is presented that enables quantification to 0.1% strain and 0.1° rotation across the whole field of view. This calibration is also critical for the accurate measurement of local lattice parameters from HRTEM images.

AB - The distortions introduced into high-resolution transmission electron microscope (HRTEM) images by the projector lens system are an important source of systematic error for quantitative displacement and strain determination. Using geometric phase analysis of images of perfect crystals, we measured these errors for two different transmission electron microscopes. Local magnification varies by as much as 5%, and rotation can reach 2° across a typical image. Our experimental results are compared with theory, and optical pincushion and spiral distortion coefficients are determined. A method for calibrating and removing these distortions is presented that enables quantification to 0.1% strain and 0.1° rotation across the whole field of view. This calibration is also critical for the accurate measurement of local lattice parameters from HRTEM images.

KW - Geometric phase

KW - HRTEM

KW - Lattice parameter determination

KW - Optical distortions

KW - Projector lens

KW - Strain

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DO - 10.1093/jmicro/dfi042

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SN - 0022-0744

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JO - Journal of Electron Microscopy

JF - Journal of Electron Microscopy

IS - 3

ER -

Calibration of projector lens distortions

Abstract

Keywords

ASJC Scopus subject areas

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