Bulk-Si-compatible ultrathin-body SOI technology for sub-100 nm MOSFETs

V. Subramanian, J. Kedzierski, N. Lindert, H. Tam, Y. Su, J. McHale, Yu Cao, T. J. King, J. Bokor, C. Hu

Research output: Chapter in Book/Report/Conference proceedingChapter

14 Scopus citations

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Engineering & Materials Science