Boron doping of diamond thin films

J. Mort, D. Kuhman, M. Machonkin, M. Morgan, F. Jansen, K. Okumura, Y. M. LeGrice, R. J. Nemanich

Research output: Contribution to journalArticlepeer-review

78 Scopus citations

Abstract

The electrical conductivity of diamond thin films produced by the hot-filament technique is found to increase when diborane is incorporated in the precursor gas mixture. The combination of well-defined bulk conductivity measurements with quantitative secondary-ion mass spectrometry and Raman spectroscopy shows that the conductivity increase is associated with atomic boron doping and rules out any significant role for a graphitic-type component.

Original languageEnglish (US)
Pages (from-to)1121-1123
Number of pages3
JournalApplied Physics Letters
Volume55
Issue number11
DOIs
StatePublished - Dec 1 1989
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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