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Boron activation and diffusion in silicon and strained silicon-on-insulator by rapid thermal and flash lamp annealings
F. Lanzerath, D. Buca, H. Trinkaus, M. Goryll, S. Mantl, J. Knoch, U. Breuer, W. Skorupa, B. Ghyselen
Research output: Contribution to journal › Article › peer-review
38
Scopus
citations