Bi-stable RF MEMS switch with low actuation voltage

Narendra V. Lakamraju, Stephen Phillips

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long. This work describes a design and fabrication process for an RF MEMS switch that can handle higher RF power with CMOS compatible operating voltages.

Original languageEnglish (US)
Title of host publicationProceedings - 2005 International Symposium on Microelectronics, IMAPS 2005
Pages845-851
Number of pages7
StatePublished - Dec 1 2005
Event38th International Symposium on Microelectronics, IMAPS 2005 - Philadelphia, PA, United States
Duration: Sep 25 2005Sep 29 2005

Publication series

NameProceedings - 2005 International Symposium on Microelectronics, IMAPS 2005

Other

Other38th International Symposium on Microelectronics, IMAPS 2005
CountryUnited States
CityPhiladelphia, PA
Period9/25/059/29/05

Keywords

  • CMOS
  • Electrostatic
  • High power
  • MEMS switch
  • RF

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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