Abstract
Photosensitive benzocyclobutene (photo-BCB) is a class of photoimagable polymers developed for microelectronics under the trade name Cyclotene™ with properties that we believe make it an attractive candidate for chronic implant applications. We report for the first time a complete microfabrication process of BCB polymer-based intracortical neural implant for chronic application. The new design of the implant provides flexibility for micro-motion compliance at the brain/implant interface and the necessary stiffness for better surgical handling. We have demonstrated that the implant with a silicon backbone layer of 5∼10μm is robust enough to penetrate the pia without buckling, a major drawback with polymer. The averaged impedance value at 1KHz was∼250 KΩ.
Original language | English (US) |
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Title of host publication | Annual International Conference of the IEEE Engineering in Medicine and Biology - Proceedings |
Editors | R.S. Leder |
Pages | 3364-3367 |
Number of pages | 4 |
Volume | 4 |
State | Published - 2003 |
Event | A New Beginning for Human Health: Proceedings of the 25th Annual International Conference of the IEEE Engineering in Medicine and Biology Society - Cancun, Mexico Duration: Sep 17 2003 → Sep 21 2003 |
Other
Other | A New Beginning for Human Health: Proceedings of the 25th Annual International Conference of the IEEE Engineering in Medicine and Biology Society |
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Country/Territory | Mexico |
City | Cancun |
Period | 9/17/03 → 9/21/03 |
Keywords
- Benzocyclobutene
- Bio-MEMS
- Micromotion
- Neural interface
- Neuroprosthetics
ASJC Scopus subject areas
- Bioengineering