Beam-induced damage to thin specimens in an intense electron probe

Raymond F. Egerton; Feng Wang; Peter Crozier

doi:10.1017/S1431927606060065

Beam-induced damage to thin specimens in an intense electron probe

Raymond F. Egerton, Feng Wang, Peter Crozier

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

97 Scopus citations

Abstract

We have investigated the changes produced in single-element and two-layer transmission electron microscope (TEM) specimens irradiated by an intense nanometer-sized electron probe, such as that produced in a field-emission or aberration-corrected TEM. These changes include hole formation and the accumulation of material within the irradiated area. The results are discussed in terms of mechanisms, including electron-beam sputtering and surface diffusion. Strategies for minimizing the effect of the beam are considered.

Original language	English (US)
Pages (from-to)	65-71
Number of pages	7
Journal	Microscopy and Microanalysis
Volume	12
Issue number	1
DOIs	https://doi.org/10.1017/S1431927606060065
State	Published - Feb 2006

Keywords

Aberration-corrected probe
Electron sputtering
Radiation damage

ASJC Scopus subject areas

Instrumentation

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abstract = "We have investigated the changes produced in single-element and two-layer transmission electron microscope (TEM) specimens irradiated by an intense nanometer-sized electron probe, such as that produced in a field-emission or aberration-corrected TEM. These changes include hole formation and the accumulation of material within the irradiated area. The results are discussed in terms of mechanisms, including electron-beam sputtering and surface diffusion. Strategies for minimizing the effect of the beam are considered.",

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AU - Wang, Feng

AU - Crozier, Peter

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N2 - We have investigated the changes produced in single-element and two-layer transmission electron microscope (TEM) specimens irradiated by an intense nanometer-sized electron probe, such as that produced in a field-emission or aberration-corrected TEM. These changes include hole formation and the accumulation of material within the irradiated area. The results are discussed in terms of mechanisms, including electron-beam sputtering and surface diffusion. Strategies for minimizing the effect of the beam are considered.

AB - We have investigated the changes produced in single-element and two-layer transmission electron microscope (TEM) specimens irradiated by an intense nanometer-sized electron probe, such as that produced in a field-emission or aberration-corrected TEM. These changes include hole formation and the accumulation of material within the irradiated area. The results are discussed in terms of mechanisms, including electron-beam sputtering and surface diffusion. Strategies for minimizing the effect of the beam are considered.

KW - Aberration-corrected probe

KW - Electron sputtering

KW - Radiation damage

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Beam-induced damage to thin specimens in an intense electron probe

Abstract

Keywords

ASJC Scopus subject areas

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