Ballistic transport-reaction prediction of film conformality in tetraethoxysilane 02 plasma enhanced deposition of silicon dioxide

T. S. Cale, Gregory Raupp, T. H. Gandy

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Fingerprint Dive into the research topics of 'Ballistic transport-reaction prediction of film conformality in tetraethoxysilane 02 plasma enhanced deposition of silicon dioxide'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy