Balanced machine workload dispatching scheme for wafer fab

Myoungsoo Ham, John W. Fowler

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

A fab-wide dispatching scheme called Balanced Machine Workload (BMW) which considers k-machine look ahead and J-machine look back is proposed. This research is motivated by the Minimum Inventory Variability Scheduling (MIVS) policy which considers the inventories at the next K-steps and the previous J-steps. Instead of looking at the fab flow from the step viewpoint, the BMW dispatching scheme looks at it from the machine viewpoint. The proposed dispatching scheme checks the workload of K-downstream machines and J-upstream machines for multiple products where K and J are dynamically calculated based on the current line status. Simulation results demonstrate the superior performance of the BMW dispatching scheme over MIVS.

Original languageEnglish (US)
Title of host publication2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, ASMC
Pages390-395
Number of pages6
DOIs
StatePublished - Oct 1 2007
Externally publishedYes
Event2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, ASMC - Stresa, Italy
Duration: Jun 11 2007Jun 12 2007

Publication series

NameASMC (Advanced Semiconductor Manufacturing Conference) Proceedings
ISSN (Print)1078-8743

Other

Other2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, ASMC
CountryItaly
CityStresa
Period6/11/076/12/07

Keywords

  • Dispatching
  • Fab
  • Scheduling
  • Workload

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Engineering(all)
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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