Background intensity problems in high resolution defect imaging

A. Howie, N. Jiang, John Spence, J. Wu

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)900-901
Number of pages2
JournalMicroscopy and Microanalysis
Volume12
Issue numberSUPPL. 2
DOIs
StatePublished - Aug 1 2006

ASJC Scopus subject areas

  • Instrumentation

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