Avoiding the curtaining effect: Backside milling by FIB INLO

Stephen M. Schwarz; Brian W. Kempshall; Lucille A. Giannuzzi; Martha McCartney

doi:10.1017/S1431927603031179

Avoiding the curtaining effect: Backside milling by FIB INLO

Stephen M. Schwarz, Brian W. Kempshall, Lucille A. Giannuzzi, Martha McCartney

Physics

Research output: Contribution to journal › Article › peer-review

27 Scopus citations

Original language	English (US)
Pages (from-to)	116-117
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	9
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/S1431927603031179
State	Published - 2003

ASJC Scopus subject areas

Instrumentation

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10.1017/S1431927603031179

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title = "Avoiding the curtaining effect: Backside milling by FIB INLO",

author = "Schwarz, {Stephen M.} and Kempshall, {Brian W.} and Giannuzzi, {Lucille A.} and Martha McCartney",

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T1 - Avoiding the curtaining effect

T2 - Backside milling by FIB INLO

AU - Schwarz, Stephen M.

AU - Kempshall, Brian W.

AU - Giannuzzi, Lucille A.

AU - McCartney, Martha

PY - 2003

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JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - SUPPL. 2

ER -

Avoiding the curtaining effect: Backside milling by FIB INLO

ASJC Scopus subject areas

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