Avoiding the curtaining effect: Backside milling by FIB INLO

Stephen M. Schwarz, Brian W. Kempshall, Lucille A. Giannuzzi, Martha McCartney

Research output: Contribution to journalArticle

23 Scopus citations
Original languageEnglish (US)
Pages (from-to)116-117
Number of pages2
JournalMicroscopy and Microanalysis
Volume9
Issue numberSUPPL. 2
DOIs
StatePublished - Sep 4 2003

ASJC Scopus subject areas

  • Instrumentation

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