AUTOMATED IC FABRICATION FOR VLSI.

J. M. Robertson, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The task of producing IC's is formidable and the resources of the industry have been seriously extended to maintain existing production technology. However, the industry now faces new challenges in very large scale integration (VLSI) where there may be up to 10**6 devices on each chip and CAM offers the only production option. This paper considers the specific problems of applying CAM to VLSI circuit fabrication.

Original languageEnglish (US)
Title of host publicationIEE Conference Publication
Place of PublicationLondon, Engl
PublisherIEE
Pages75-78
Number of pages4
Edition243
ISBN (Print)0852963033
StatePublished - 1984
Externally publishedYes

Fingerprint

VLSI circuits
Computer aided manufacturing
Fabrication
Industry
Networks (circuits)

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Robertson, J. M., & Walton, A. J. (1984). AUTOMATED IC FABRICATION FOR VLSI. In IEE Conference Publication (243 ed., pp. 75-78). London, Engl: IEE.

AUTOMATED IC FABRICATION FOR VLSI. / Robertson, J. M.; Walton, A. J.

IEE Conference Publication. 243. ed. London, Engl : IEE, 1984. p. 75-78.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Robertson, JM & Walton, AJ 1984, AUTOMATED IC FABRICATION FOR VLSI. in IEE Conference Publication. 243 edn, IEE, London, Engl, pp. 75-78.
Robertson JM, Walton AJ. AUTOMATED IC FABRICATION FOR VLSI. In IEE Conference Publication. 243 ed. London, Engl: IEE. 1984. p. 75-78
Robertson, J. M. ; Walton, A. J. / AUTOMATED IC FABRICATION FOR VLSI. IEE Conference Publication. 243. ed. London, Engl : IEE, 1984. pp. 75-78
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