AUTOMATED IC FABRICATION FOR VLSI.

J. M. Robertson, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The task of producing IC's is formidable and the resources of the industry have been seriously extended to maintain existing production technology. However, the industry now faces new challenges in very large scale integration (VLSI) where there may be up to 10**6 devices on each chip and CAM offers the only production option. This paper considers the specific problems of applying CAM to VLSI circuit fabrication.

Original languageEnglish (US)
Title of host publicationIEE Conference Publication
PublisherIEE
Pages75-78
Number of pages4
Edition243
ISBN (Print)0852963033
StatePublished - Dec 1 1984

Publication series

NameIEE Conference Publication
Number243

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'AUTOMATED IC FABRICATION FOR VLSI.'. Together they form a unique fingerprint.

  • Cite this

    Robertson, J. M., & Walton, A. J. (1984). AUTOMATED IC FABRICATION FOR VLSI. In IEE Conference Publication (243 ed., pp. 75-78). (IEE Conference Publication; No. 243). IEE.