Abstract
High spatial resolution Auger electron spectra and images have been obtained by optimizing secondary electron collection efficiency in a scanning transmission electron microscope (STEM). We describe an ultrahigh vacuum, 100 keV STEM which is capable of collecting Auger electron spectra and images with edge resolutions of ≤5 nm. Typical spectra and images from the Ge/Si(100) and Ag/Si(100) film growth systems are presented and discussed. These images demonstrate high-resolution elemental mapping which can be used in the study of surface processes on the nanometer scale.
Original language | English (US) |
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Pages (from-to) | 1890-1892 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 58 |
Issue number | 17 |
DOIs | |
State | Published - Dec 1 1991 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)