Auger electron spectroscopy and microscopy with probe-size limited resolution

G. G. Hembree; Jeffery Drucker; F. C H Luo; M. Krishnamurthy; J. A. Venables

doi:10.1063/1.105064

Auger electron spectroscopy and microscopy with probe-size limited resolution

G. G. Hembree, Jeffery Drucker, F. C H Luo, M. Krishnamurthy, J. A. Venables

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

Abstract

High spatial resolution Auger electron spectra and images have been obtained by optimizing secondary electron collection efficiency in a scanning transmission electron microscope (STEM). We describe an ultrahigh vacuum, 100 keV STEM which is capable of collecting Auger electron spectra and images with edge resolutions of ≤5 nm. Typical spectra and images from the Ge/Si(100) and Ag/Si(100) film growth systems are presented and discussed. These images demonstrate high-resolution elemental mapping which can be used in the study of surface processes on the nanometer scale.

Original language	English (US)
Pages (from-to)	1890-1892
Number of pages	3
Journal	Applied Physics Letters
Volume	58
Issue number	17
DOIs	https://doi.org/10.1063/1.105064
State	Published - 1991

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.105064

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abstract = "High spatial resolution Auger electron spectra and images have been obtained by optimizing secondary electron collection efficiency in a scanning transmission electron microscope (STEM). We describe an ultrahigh vacuum, 100 keV STEM which is capable of collecting Auger electron spectra and images with edge resolutions of ≤5 nm. Typical spectra and images from the Ge/Si(100) and Ag/Si(100) film growth systems are presented and discussed. These images demonstrate high-resolution elemental mapping which can be used in the study of surface processes on the nanometer scale.",

author = "Hembree, {G. G.} and Jeffery Drucker and Luo, {F. C H} and M. Krishnamurthy and Venables, {J. A.}",

year = "1991",

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AU - Hembree, G. G.

AU - Drucker, Jeffery

AU - Luo, F. C H

AU - Krishnamurthy, M.

AU - Venables, J. A.

PY - 1991

Y1 - 1991

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AB - High spatial resolution Auger electron spectra and images have been obtained by optimizing secondary electron collection efficiency in a scanning transmission electron microscope (STEM). We describe an ultrahigh vacuum, 100 keV STEM which is capable of collecting Auger electron spectra and images with edge resolutions of ≤5 nm. Typical spectra and images from the Ge/Si(100) and Ag/Si(100) film growth systems are presented and discussed. These images demonstrate high-resolution elemental mapping which can be used in the study of surface processes on the nanometer scale.

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Auger electron spectroscopy and microscopy with probe-size limited resolution

Abstract

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