Auger electron spectroscopy and microscopy with probe-size limited resolution

G. G. Hembree, Jeffery Drucker, F. C H Luo, M. Krishnamurthy, J. A. Venables

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

Abstract

High spatial resolution Auger electron spectra and images have been obtained by optimizing secondary electron collection efficiency in a scanning transmission electron microscope (STEM). We describe an ultrahigh vacuum, 100 keV STEM which is capable of collecting Auger electron spectra and images with edge resolutions of ≤5 nm. Typical spectra and images from the Ge/Si(100) and Ag/Si(100) film growth systems are presented and discussed. These images demonstrate high-resolution elemental mapping which can be used in the study of surface processes on the nanometer scale.

Original languageEnglish (US)
Pages (from-to)1890-1892
Number of pages3
JournalApplied Physics Letters
Volume58
Issue number17
DOIs
StatePublished - Dec 1 1991

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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