Atomic species identification in scanning tunneling microscopy by time-of-flight spectroscopy

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27 Scopus citations

Abstract

We report the first chemical identification of a cluster of atoms from identifiable sites on an extended crystal surface. The instrument used combines the functions of a scanning tunneling microscope (STM) with a time-of-flight (TOF) atom probe. Atoms are transferred from regions of interest identified in STM images to the tip, from which they are ejected into a TOF spectrometer. Preliminary results are shown in which a cluster of silicon atoms taken from the Si(111)7×7 surface is identified by TOF spectra. Applications of these "atomic tweezers" for microanalysis are discussed.

Original languageEnglish (US)
Pages (from-to)1587-1590
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume14
Issue number3
DOIs
StatePublished - 1996

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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