Abstract
We report the first chemical identification of a cluster of atoms from identifiable sites on an extended crystal surface. The instrument used combines the functions of a scanning tunneling microscope (STM) with a time-of-flight (TOF) atom probe. Atoms are transferred from regions of interest identified in STM images to the tip, from which they are ejected into a TOF spectrometer. Preliminary results are shown in which a cluster of silicon atoms taken from the Si(111)7×7 surface is identified by TOF spectra. Applications of these "atomic tweezers" for microanalysis are discussed.
Original language | English (US) |
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Pages (from-to) | 1587-1590 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 14 |
Issue number | 3 |
DOIs | |
State | Published - 1996 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering