Fingerprint
Dive into the research topics of 'Atomic layer chemical vapor deposition of ZrO2-based dielectric films: Nanostructure and nanochemistry'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Sandwip Dey, C. G. Wang, D. Tang, M. J. Kim, Ray Carpenter, C. Werkhoven, E. Shero
Research output: Contribution to journal › Article › peer-review