Atomic imaging of surfaces by electron microscopy

David Smith

doi:10.1016/0039-6028(86)90323-7

Atomic imaging of surfaces by electron microscopy

David Smith

CLAS-NS: Solid State Science, LeRoy Eyring Center for (CSSS)

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

Electron microscopes with atomic resolution have recently been used to study surfaces and to observe surface processes in real-time. The role of image simulations in confirming the interpretation of surface profile images is discussed and recent applications of the profile imaging technique to study semiconductors, oxides, the oxidation of metals, and small metal particles are briefly reviewed. Finally, the accumulation of metal deposits on some oxide and semiconductor surfaces due to electron-stimulated desorption processes is described.

Original language	English (US)
Pages (from-to)	462-474
Number of pages	13
Journal	Surface Science
Volume	178
Issue number	1-3
DOIs	https://doi.org/10.1016/0039-6028(86)90323-7
State	Published - Dec 3 1986

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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title = "Atomic imaging of surfaces by electron microscopy",

abstract = "Electron microscopes with atomic resolution have recently been used to study surfaces and to observe surface processes in real-time. The role of image simulations in confirming the interpretation of surface profile images is discussed and recent applications of the profile imaging technique to study semiconductors, oxides, the oxidation of metals, and small metal particles are briefly reviewed. Finally, the accumulation of metal deposits on some oxide and semiconductor surfaces due to electron-stimulated desorption processes is described.",

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