Atomic force microscopy-based experimental setup for studying domain switching dynamics in ferroelectric capacitors

C. Dehoff, B. J. Rodriguez, A. I. Kingon, R. J. Nemanich, A. Gruverman, J. S. Cross

Research output: Contribution to journalArticle

36 Scopus citations

Abstract

This article describes an experimental setup for combined measurements of domain switching dynamics and switching currents in micrometer scale ferroelectric capacitors. The setup is based on a commercial atomic force microscope (AFM) that is equipped with a piezoresponse mode for domain imaging and with a wide bandwidth current amplifier for switching current recording. The setup allows combined domain/current measurements in capacitors as small as 1 μm 2 with switching times resolved down to 10 ns. The incorporation of switching current measurement capability into piezoresponse AFM makes detailed analysis of switching behavior in ferroelectric memory devices possible.

Original languageEnglish (US)
Article number023708
Pages (from-to)023708-1-023708-5
JournalReview of Scientific Instruments
Volume76
Issue number2
DOIs
StatePublished - Jan 25 2005

ASJC Scopus subject areas

  • Instrumentation

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