The emission characteristics of a liquid-metal ion source have been studied with a magnetic-sector atom-probe field-ion microscope. The emission is classified into low, intermediate, and high intensity emission regimes. In the high intensity emission regime the emission is approximately 99% Ga** plus , but Ga** plus ** plus and molecular gallium ions are also present. The relative intensities of Ga** plus , Ga** plus ** plus , Ga//2** plus , and Ga//3** plus were measured as a function of total current in the high intensity emission regime. Energy distributions of these four species were also measured at various total currents.
|Original language||English (US)|
|Number of pages||4|
|Journal||Journal of vacuum science & technology|
|State||Published - Jan 1 1979|
|Event||Proc of the Natl Symp of the Am Vac Soc, 26th - New York, NY, USA|
Duration: Oct 1 1979 → Oct 5 1979
ASJC Scopus subject areas