Approaching the resolution limit of nanometer-scale electron beam-induced deposition

Willem F. Van Dorp, Bob Van Someren, Cornells W. Hagen, Pieter Kruit, Peter Crozier

Research output: Contribution to journalArticlepeer-review

230 Scopus citations

Fingerprint

Dive into the research topics of 'Approaching the resolution limit of nanometer-scale electron beam-induced deposition'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds