@inproceedings{9f69d7a12a8f494aac377e60e237087b,
title = "Application of mass transport in solid electrolyte films in tunable microelectromechanical resonators",
abstract = "This paper reports on Ag-Ge-Se solid electrolyte films which can support the rapid net displacement of metal mass from a silver source to a target location within a MEMS device at low voltage and current. This displacement of mass can be used to alter material parameters and we have demonstrated a tunable MEMS resonator using this principle. In this application, the electrodeposited mass is made to form on a suspended polycrystalline silicon beam to change both its vibrating mass and stiffness, without significantly degrading the Q-factor. The paper includes some of the initial results from the resonator work and places particular emphasis on the solid state electrodeposition process and its relationship to the electrolyte composition.",
keywords = "Chalcogenide, Electrodeposition, Microelectromechanical resonator, Solid electrolyte, Tuning",
author = "Michael Kozicki and Brown, {C. L.} and M. Mitkova and S. Enderling and J. Hedley and Walton, {A. J.}",
year = "2005",
language = "English (US)",
isbn = "0976798522",
series = "2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings",
pages = "447--450",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings",
note = "2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 ; Conference date: 08-05-2005 Through 12-05-2005",
}