Application of mass transport in solid electrolyte films in tunable microelectromechanical resonators

Michael Kozicki, C. L. Brown, M. Mitkova, S. Enderling, J. Hedley, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on Ag-Ge-Se solid electrolyte films which can support the rapid net displacement of metal mass from a silver source to a target location within a MEMS device at low voltage and current. This displacement of mass can be used to alter material parameters and we have demonstrated a tunable MEMS resonator using this principle. In this application, the electrodeposited mass is made to form on a suspended polycrystalline silicon beam to change both its vibrating mass and stiffness, without significantly degrading the Q-factor. The paper includes some of the initial results from the resonator work and places particular emphasis on the solid state electrodeposition process and its relationship to the electrolyte composition.

Original languageEnglish (US)
Title of host publication2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings
EditorsM. Laudon, B. Romanowicz
Pages447-450
Number of pages4
StatePublished - Dec 1 2005
Event2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 - Anaheim, CA, United States
Duration: May 8 2005May 12 2005

Publication series

Name2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings

Other

Other2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005
CountryUnited States
CityAnaheim, CA
Period5/8/055/12/05

Keywords

  • Chalcogenide
  • Electrodeposition
  • Microelectromechanical resonator
  • Solid electrolyte
  • Tuning

ASJC Scopus subject areas

  • Engineering(all)

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