Anisotropic mesh refinement for the simulation of three-dimensional semiconductor manufacturing processes

Wilfried Wessner, Johann Cervenka, Clemens Heitzinger, Andreas Hössinger, Siegfried Selberherr

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Fingerprint

Dive into the research topics of 'Anisotropic mesh refinement for the simulation of three-dimensional semiconductor manufacturing processes'. Together they form a unique fingerprint.

Engineering & Materials Science