Analysis of nano-scale stress in strained silicon materials and microelectronics devices by energy-filtered convergent beam electron diffraction

Peng Zhang, Andrei A. Istratov, Haifeng He, Joel W. Ager, Chris Nelson, Eric Stach, John Mardinly, Christian Kisielowski, Eicke R. Weber, John C.H. Spence

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

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Engineering & Materials Science