An optoelectronic/microfluidic inclination sensor for vestibular implants

David Welch; Stephen Herman; Sahana Sen; Jennifer Blain Christen; Julius Georgiou

doi:10.1109/BIOCAS.2009.5372028

An optoelectronic/microfluidic inclination sensor for vestibular implants

David Welch, Stephen Herman, Sahana Sen, Jennifer Blain Christen, Julius Georgiou

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

We present a MEMS device fabricated in the SensoNor MultiMEMS process to replicate the tilt sensing function of the human vestibular system. Our device uses opaque fluid movement within a cavity to govern the amount of light that reaches strategically placed photosensing regions. In addition to the device we have included various structures so that we can determine the performance of various photodiode structures. The photodiodes were tested both to obtain their intrinsic current-voltage relationship without optical illumination and for their photo-sensitive characteristics by providing varying levels of optical excitation. The forward bias turn-on voltage was approximately 700 mV and varied across different device doping.

Original language	English (US)
Title of host publication	2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009
Pages	281-284
Number of pages	4
DOIs	https://doi.org/10.1109/BIOCAS.2009.5372028
State	Published - 2009
Event	2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009 - Beijing, China Duration: Nov 26 2009 → Nov 28 2009

Publication series

Name	2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009

Other

Other	2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009
Country/Territory	China
City	Beijing
Period	11/26/09 → 11/28/09

ASJC Scopus subject areas

Hardware and Architecture
Biomedical Engineering
Electrical and Electronic Engineering

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10.1109/BIOCAS.2009.5372028

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An optoelectronic/microfluidic inclination sensor for vestibular implants. / Welch, David; Herman, Stephen; Sen, Sahana et al.
2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009. 2009. p. 281-284 5372028 (2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Welch, D, Herman, S, Sen, S, Blain Christen, J & Georgiou, J 2009, An optoelectronic/microfluidic inclination sensor for vestibular implants. in 2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009., 5372028, 2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009, pp. 281-284, 2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009, Beijing, China, 11/26/09. https://doi.org/10.1109/BIOCAS.2009.5372028

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abstract = "We present a MEMS device fabricated in the SensoNor MultiMEMS process to replicate the tilt sensing function of the human vestibular system. Our device uses opaque fluid movement within a cavity to govern the amount of light that reaches strategically placed photosensing regions. In addition to the device we have included various structures so that we can determine the performance of various photodiode structures. The photodiodes were tested both to obtain their intrinsic current-voltage relationship without optical illumination and for their photo-sensitive characteristics by providing varying levels of optical excitation. The forward bias turn-on voltage was approximately 700 mV and varied across different device doping.",

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An optoelectronic/microfluidic inclination sensor for vestibular implants

Abstract

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