An optoelectronic/microfluidic inclination sensor for vestibular implants

David Welch, Stephen Herman, Sahana Sen, Jennifer Blain Christen, Julius Georgiou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We present a MEMS device fabricated in the SensoNor MultiMEMS process to replicate the tilt sensing function of the human vestibular system. Our device uses opaque fluid movement within a cavity to govern the amount of light that reaches strategically placed photosensing regions. In addition to the device we have included various structures so that we can determine the performance of various photodiode structures. The photodiodes were tested both to obtain their intrinsic current-voltage relationship without optical illumination and for their photo-sensitive characteristics by providing varying levels of optical excitation. The forward bias turn-on voltage was approximately 700 mV and varied across different device doping.

Original languageEnglish (US)
Title of host publication2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009
Pages281-284
Number of pages4
DOIs
StatePublished - 2009
Event2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009 - Beijing, China
Duration: Nov 26 2009Nov 28 2009

Other

Other2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009
CountryChina
CityBeijing
Period11/26/0911/28/09

Fingerprint

Photodiodes
Microfluidics
Optoelectronic devices
Photoexcitation
Sensors
Electric potential
MEMS
Lighting
Doping (additives)
Fluids

ASJC Scopus subject areas

  • Hardware and Architecture
  • Biomedical Engineering
  • Electrical and Electronic Engineering

Cite this

Welch, D., Herman, S., Sen, S., Blain Christen, J., & Georgiou, J. (2009). An optoelectronic/microfluidic inclination sensor for vestibular implants. In 2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009 (pp. 281-284). [5372028] https://doi.org/10.1109/BIOCAS.2009.5372028

An optoelectronic/microfluidic inclination sensor for vestibular implants. / Welch, David; Herman, Stephen; Sen, Sahana; Blain Christen, Jennifer; Georgiou, Julius.

2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009. 2009. p. 281-284 5372028.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Welch, D, Herman, S, Sen, S, Blain Christen, J & Georgiou, J 2009, An optoelectronic/microfluidic inclination sensor for vestibular implants. in 2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009., 5372028, pp. 281-284, 2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009, Beijing, China, 11/26/09. https://doi.org/10.1109/BIOCAS.2009.5372028
Welch D, Herman S, Sen S, Blain Christen J, Georgiou J. An optoelectronic/microfluidic inclination sensor for vestibular implants. In 2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009. 2009. p. 281-284. 5372028 https://doi.org/10.1109/BIOCAS.2009.5372028
Welch, David ; Herman, Stephen ; Sen, Sahana ; Blain Christen, Jennifer ; Georgiou, Julius. / An optoelectronic/microfluidic inclination sensor for vestibular implants. 2009 IEEE Biomedical Circuits and Systems Conference, BioCAS 2009. 2009. pp. 281-284
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