An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides

Guangxu Ju, Matthew J. Highland, Angel Yanguas-Gil, Carol Thompson, Jeffrey A. Eastman, Hua Zhou, Sean M. Brennan, G. Brian Stephenson, Paul H. Fuoss

Research output: Contribution to journalArticle

6 Scopus citations

Abstract

We describe an instrument that exploits the ongoing revolution in synchrotron sources, optics, and detectors to enable in situ studies of metal-organic vapor phase epitaxy (MOVPE) growth of III-nitride materials using coherent x-ray methods. The system includes high-resolution positioning of the sample and detector including full rotations, an x-ray transparent chamber wall for incident and diffracted beam access over a wide angular range, and minimal thermal sample motion, giving the sub-micron positional stability and reproducibility needed for coherent x-ray studies. The instrument enables surface x-ray photon correlation spectroscopy, microbeam diffraction, and coherent diffraction imaging of atomic-scale surface and film structure and dynamics during growth, to provide fundamental understanding of MOVPE processes.

Original languageEnglish (US)
Article number035113
JournalReview of Scientific Instruments
Volume88
Issue number3
DOIs
StatePublished - Mar 1 2017

ASJC Scopus subject areas

  • Instrumentation

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    Ju, G., Highland, M. J., Yanguas-Gil, A., Thompson, C., Eastman, J. A., Zhou, H., Brennan, S. M., Stephenson, G. B., & Fuoss, P. H. (2017). An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides. Review of Scientific Instruments, 88(3), [035113]. https://doi.org/10.1063/1.4978656