An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides

Guangxu Ju, Matthew J. Highland, Angel Yanguas-Gil, Carol Thompson, Jeffrey A. Eastman, Hua Zhou, Sean M. Brennan, G. Brian Stephenson, Paul H. Fuoss

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

We describe an instrument that exploits the ongoing revolution in synchrotron sources, optics, and detectors to enable in situ studies of metal-organic vapor phase epitaxy (MOVPE) growth of III-nitride materials using coherent x-ray methods. The system includes high-resolution positioning of the sample and detector including full rotations, an x-ray transparent chamber wall for incident and diffracted beam access over a wide angular range, and minimal thermal sample motion, giving the sub-micron positional stability and reproducibility needed for coherent x-ray studies. The instrument enables surface x-ray photon correlation spectroscopy, microbeam diffraction, and coherent diffraction imaging of atomic-scale surface and film structure and dynamics during growth, to provide fundamental understanding of MOVPE processes.

Original languageEnglish (US)
Article number035113
JournalReview of Scientific Instruments
Volume88
Issue number3
DOIs
StatePublished - Mar 1 2017
Externally publishedYes

Fingerprint

Vapor phase epitaxy
vapor phase epitaxy
Nitrides
nitrides
X rays
Metals
metals
x rays
Diffraction
Photon correlation spectroscopy
Detectors
microbeams
detectors
Synchrotrons
diffraction
positioning
Light sources
Optics
synchrotrons
chambers

ASJC Scopus subject areas

  • Instrumentation

Cite this

Ju, G., Highland, M. J., Yanguas-Gil, A., Thompson, C., Eastman, J. A., Zhou, H., ... Fuoss, P. H. (2017). An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides. Review of Scientific Instruments, 88(3), [035113]. https://doi.org/10.1063/1.4978656

An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides. / Ju, Guangxu; Highland, Matthew J.; Yanguas-Gil, Angel; Thompson, Carol; Eastman, Jeffrey A.; Zhou, Hua; Brennan, Sean M.; Stephenson, G. Brian; Fuoss, Paul H.

In: Review of Scientific Instruments, Vol. 88, No. 3, 035113, 01.03.2017.

Research output: Contribution to journalArticle

Ju, G, Highland, MJ, Yanguas-Gil, A, Thompson, C, Eastman, JA, Zhou, H, Brennan, SM, Stephenson, GB & Fuoss, PH 2017, 'An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides', Review of Scientific Instruments, vol. 88, no. 3, 035113. https://doi.org/10.1063/1.4978656
Ju, Guangxu ; Highland, Matthew J. ; Yanguas-Gil, Angel ; Thompson, Carol ; Eastman, Jeffrey A. ; Zhou, Hua ; Brennan, Sean M. ; Stephenson, G. Brian ; Fuoss, Paul H. / An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides. In: Review of Scientific Instruments. 2017 ; Vol. 88, No. 3.
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