An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides

Guangxu Ju, Matthew J. Highland, Angel Yanguas-Gil, Carol Thompson, Jeffrey A. Eastman, Hua Zhou, Sean M. Brennan, G. Brian Stephenson, Paul H. Fuoss

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

We describe an instrument that exploits the ongoing revolution in synchrotron sources, optics, and detectors to enable in situ studies of metal-organic vapor phase epitaxy (MOVPE) growth of III-nitride materials using coherent x-ray methods. The system includes high-resolution positioning of the sample and detector including full rotations, an x-ray transparent chamber wall for incident and diffracted beam access over a wide angular range, and minimal thermal sample motion, giving the sub-micron positional stability and reproducibility needed for coherent x-ray studies. The instrument enables surface x-ray photon correlation spectroscopy, microbeam diffraction, and coherent diffraction imaging of atomic-scale surface and film structure and dynamics during growth, to provide fundamental understanding of MOVPE processes.

Original languageEnglish (US)
Article number035113
JournalReview of Scientific Instruments
Volume88
Issue number3
DOIs
StatePublished - Mar 1 2017
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

Fingerprint

Dive into the research topics of 'An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides'. Together they form a unique fingerprint.

Cite this