@inproceedings{23ea891a608f477183964ff2551b65bd,
title = "An electromagnetically actuated microspeaker with fully-integrated wax-bonded Nd-Fe-B micromagnets for hearing aid applications",
abstract = "We present a fully-integrated, electromagnetically actuated microspeaker intended for hearing aid applications. The microspeaker uses the Lorentz force to actuate multi-turn, multi-layer copper coils embedded in a 3-mm-diameter parylene diaphragm. Process-compatible micromachined permanent magnets are employed for size reduction and batch-manufacturability. The permanent magnets are composed of micro-size Nd-Fe-B particles in a wax binder. The microspeaker produces 0.64μm peak displacement at 1 kHz for a drive current of 88 mA rms (6 . coil impedance), corresponding to a 46 mW power consumption.",
keywords = "Hearing aids, MEMS, Micromagnets, Microspeaker, Nd-Fe-B permanent magnet",
author = "Je, {Sang Soo} and Naigang Wang and Brown, {Henry C.} and Arnold, {David P.} and Junseok Chae",
year = "2009",
doi = "10.1109/SENSOR.2009.5285873",
language = "English (US)",
isbn = "9781424441938",
series = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "885--888",
booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",
}