An electromagnetically actuated microspeaker with fully-integrated wax-bonded Nd-Fe-B micromagnets for hearing aid applications

Sang Soo Je, Naigang Wang, Henry C. Brown, David P. Arnold, Junseok Chae

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Scopus citations

Abstract

We present a fully-integrated, electromagnetically actuated microspeaker intended for hearing aid applications. The microspeaker uses the Lorentz force to actuate multi-turn, multi-layer copper coils embedded in a 3-mm-diameter parylene diaphragm. Process-compatible micromachined permanent magnets are employed for size reduction and batch-manufacturability. The permanent magnets are composed of micro-size Nd-Fe-B particles in a wax binder. The microspeaker produces 0.64μm peak displacement at 1 kHz for a drive current of 88 mA rms (6 . coil impedance), corresponding to a 46 mW power consumption.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages885-888
Number of pages4
DOIs
StatePublished - Dec 11 2009
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: Jun 21 2009Jun 25 2009

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

OtherTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period6/21/096/25/09

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Keywords

  • Hearing aids
  • MEMS
  • Micromagnets
  • Microspeaker
  • Nd-Fe-B permanent magnet

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Je, S. S., Wang, N., Brown, H. C., Arnold, D. P., & Chae, J. (2009). An electromagnetically actuated microspeaker with fully-integrated wax-bonded Nd-Fe-B micromagnets for hearing aid applications. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 885-888). [5285873] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285873