An electrolyte droplet-based low frequency accelerometer based on molecular electronic transducer

Hai Huang, Mengbing Liang, Rui Tang, Jon Oiler, Teng Ma, Hongyu Yu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Scopus citations

Abstract

This paper reports a liquid-state low frequency micro-accelerometer based on molecular electronic transducer (MET) which senses movement of liquid electrolyte relative to fixed electrodes. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body and MET electrodes as read-out mechanism. Silicon-based planar micro-fabrication technology is applied to simplify the fabrication and enable mass production. The device achieves sensitivity of 10.8 V/G (G = 9.81 m/s2) at 20 Hz with nearly flat response over the frequency range of 1-40 Hz and a low noise floor of 100 μG/√Hz at 20 Hz.

Original languageEnglish (US)
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages924-927
Number of pages4
DOIs
StatePublished - Dec 1 2013
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: Jun 16 2013Jun 20 2013

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CountrySpain
CityBarcelona
Period6/16/136/20/13

Keywords

  • Accelerometer
  • Electrolyte Droplet
  • Microelectromechanical Systems
  • Molecular Electronic Transducer

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Huang, H., Liang, M., Tang, R., Oiler, J., Ma, T., & Yu, H. (2013). An electrolyte droplet-based low frequency accelerometer based on molecular electronic transducer. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 924-927). [6626919] (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6626919