@inproceedings{00810c9c86ed41e4a3904166be1c0259,
title = "An electrolyte droplet-based low frequency accelerometer based on molecular electronic transducer",
abstract = "This paper reports a liquid-state low frequency micro-accelerometer based on molecular electronic transducer (MET) which senses movement of liquid electrolyte relative to fixed electrodes. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body and MET electrodes as read-out mechanism. Silicon-based planar micro-fabrication technology is applied to simplify the fabrication and enable mass production. The device achieves sensitivity of 10.8 V/G (G = 9.81 m/s2) at 20 Hz with nearly flat response over the frequency range of 1-40 Hz and a low noise floor of 100 μG/√Hz at 20 Hz.",
keywords = "Accelerometer, Electrolyte Droplet, Microelectromechanical Systems, Molecular Electronic Transducer",
author = "Hai Huang and Mengbing Liang and Rui Tang and Jon Oiler and Teng Ma and Hongyu Yu",
note = "Copyright: Copyright 2014 Elsevier B.V., All rights reserved.; 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
year = "2013",
doi = "10.1109/Transducers.2013.6626919",
language = "English (US)",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "924--927",
booktitle = "2013 Transducers and Eurosensors XXVII",
}