Abstract
We present a thermodynamic approach to introducing quantum corrections to the classical transport picture in semiconductor device simulation. The approach leads to a modified Boltzmann equation with an effective quantum potential. We study the quantum interaction of electrons with a gate oxide barrier potential in a 25 nm MOSFET.
Original language | English (US) |
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Pages (from-to) | 113-117 |
Number of pages | 5 |
Journal | Journal of Computational Electronics |
Volume | 2 |
Issue number | 2-4 |
DOIs | |
State | Published - Dec 1 2003 |
Keywords
- effective potentials
- quantum thermodynamics
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Modeling and Simulation
- Electrical and Electronic Engineering