An algorithm for smoothing three-dimensional Monte Carlo ion implantation simulation results

Mathematics

• Ion Implantation 100%
• Smoothing 49%
• Grid 43%
• Three-dimensional 38%
• Simulation 34%
• Least Squares 19%
• Monte Carlo Simulation 18%
• Semiconductor Manufacturing 18%
• Response Surface Method 18%
• Implantation 17%
• Smoothing Algorithm 15%
• Bernstein Polynomials 12%
• Simulation Methods 12%
• Multivariate Polynomials 12%
• Generalized Polynomials 12%
• Joining 11%
• Polynomial 11%
• Monte Carlo method 11%
• Sound 10%
• Performance 6%
• Arbitrary 5%
• Approximation 5%

Engineering & Materials Science

• Ion implantation 73%
• Polynomials 41%
• Joining 13%
• Semiconductor materials 11%