Abstract

Wafer level bonding is an important technology for the manufacturing of numerous microelectromechanical systems. In this work the aluminum thermo-compression wafer bonding is characterized. The effects and significance of various bond process parameters and surface treatment methods are reported on the final bond interfaces integrity and strength. Experimental variables include the bonding temperature, bonding time, and bonding atmosphere (forming gas and inert gas). Bonded wafer samples were investigated with scanning acoustic microscopy, scanning electron microscopy, and four point bending test. Interfacial adhesion energy and bond quality were found to be positively correlated with bonding temperature. A bonding temperature of 500 °C or greater is necessary to obtain bond strengths of 8-10 J/m2.

Original languageEnglish (US)
Title of host publicationMicroelectromechanical Systems - Materials and Devices III
Pages167-172
Number of pages6
StatePublished - Aug 30 2010
Event2009 MRS Fall Meeting - Boston, MA, United States
Duration: Nov 30 2009Dec 2 2009

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1222
ISSN (Print)0272-9172

Other

Other2009 MRS Fall Meeting
Country/TerritoryUnited States
CityBoston, MA
Period11/30/0912/2/09

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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