Air as an adjustable insulator for C-V and G-V analysis of semiconductor surfaces

John Moreland, Jeff Drucker, P. K. Hansma, Jörg P. Kotthaus, Arnold Adams, R. Kvaas

Research output: Contribution to journalArticle

6 Scopus citations

Abstract

An adjustable metal-air-semiconductor capacitor was fabricated using a Pb disk suspended 1700-3600 Å above an n-type Si 〈111〉 surface. Experimental differential capacitance versus voltage and differential conductance versus voltage curves are similar to those previously obtained for metal-oxide-semiconductor capacitors.

Original languageEnglish (US)
Pages (from-to)104-106
Number of pages3
JournalApplied Physics Letters
Volume45
Issue number1
DOIs
StatePublished - Dec 1 1984
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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