Advances in encapsulating elastically stretchable microelectrode arrays

Oliver Graudejus, Candice Tsay, Sigurd Wagner, Zhe Yu, Barclay Morrison, Stephanie Lacour

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

Stretchable microelectrode arrays (SMEAs) that are fabricated on the compliant silicone poly dimethyl siloxane (PDMS) have potential applications for research on traumatic brain injury (TBI). Increasing the number of electrodes in the array improves the accuracy in assessing the effects of traumatic injury to cell tissue cultures. The currently available encapsulation process with a photopatternable silicone limits the electrode density on the array. The present research examines four factors in the encapsulation process: exposure dose, scattered and reflected light as well as hard bake time. Careful optimization of these four factors leads to a significant reduction of the minimum feature size of a contact via patterned into the encapsulation layer, thus enabling an increase of the electrode density on the array.

Original languageEnglish (US)
Pages (from-to)2-7
Number of pages6
JournalMaterials Research Society Symposium Proceedings
Volume1009
StatePublished - Dec 1 2007
EventMaterials Research Society Symposium Proceedings - Advanced Materials for Neuroprosthetic Interfaces - San Francisco, CA, United States
Duration: Apr 9 2007Apr 13 2007

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ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Graudejus, O., Tsay, C., Wagner, S., Yu, Z., Morrison, B., & Lacour, S. (2007). Advances in encapsulating elastically stretchable microelectrode arrays. Materials Research Society Symposium Proceedings, 1009, 2-7.