Advanced silver-based metallization patterning for ULSI applications

Terry Alford, Phucanh Nguyen, Yuxiao Zeng, J. W. Mayer

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Fingerprint

Dive into the research topics of 'Advanced silver-based metallization patterning for ULSI applications'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds