Advanced control design considerations for the Czochralski process

Michael A. Gevelber, Michael J. Wargo, George Stephanopoulos

Research output: Contribution to journalArticlepeer-review

24 Scopus citations

Abstract

A new control system design is proposed for the Czochralski process. A set of control objectives is proposed to meet the materials objectives and limitations posed by the coupling of the process (i.e., heater, melt, meniscus, interface, crystal and environment). Attention is given to the requirements for gallium arsenide growth including thermal stress in the growing crystal. Analysis of the process dynamics indicates the disturbances and dynamic features that must be considered in the controller design.

Original languageEnglish (US)
Pages (from-to)256-263
Number of pages8
JournalJournal of Crystal Growth
Volume85
Issue number1-2
DOIs
StatePublished - Nov 1 1987
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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