Adhesion of arbitrary-shaped thin-film microstructures

Dhruv Bhate, Martin L. Dunn

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

We develop, implement in a finite element environment, and experimentally validate an approach to model adhesion of a class of arbitrary-shaped thin-film microstructures commonly used in microsystems technology. The modeling approach adopts principles of three-dimensional linear elastic fracture mechanics and extends them to thin-film plate-like microstructures. A companion experimental effort is carried out to measure adhesion energy of polysilicon microcantilevers using interferometry, and then to study the adhesion behavior of a suite of circular and square plates. The finite element approach is validated by comparison with relevant analytical results. It is then applied to the circular and square plate microstructures and good agreement between measurements and predictions is obtained.

Original languageEnglish (US)
Pages (from-to)2014-2024
Number of pages11
JournalMicroelectronics Reliability
Volume47
Issue number12
DOIs
StatePublished - Dec 1 2007
Externally publishedYes

Fingerprint

circular plates
adhesion
Adhesion
Thin films
microstructure
Microstructure
thin films
fracture mechanics
Microsystems
Polysilicon
Fracture mechanics
Interferometry
interferometry
predictions
energy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Safety, Risk, Reliability and Quality
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Adhesion of arbitrary-shaped thin-film microstructures. / Bhate, Dhruv; Dunn, Martin L.

In: Microelectronics Reliability, Vol. 47, No. 12, 01.12.2007, p. 2014-2024.

Research output: Contribution to journalArticle

Bhate, Dhruv ; Dunn, Martin L. / Adhesion of arbitrary-shaped thin-film microstructures. In: Microelectronics Reliability. 2007 ; Vol. 47, No. 12. pp. 2014-2024.
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