Acetone sensor based on film bulk acoustic resonator

Xiaotun Qiu, Rui Tang, Jie Zhu, Hongyu Yu, Jon Oiler, Ziyu Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

This paper described acetone sensing using ZnO based Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the FBAR increased as the concentration of acetone increased. The detection limit of acetone was around 4 ppm. The density decrease of the ZnO induced by releasing carbon dioxide generated from the reaction between acetone and the adsorbed oxygen ions on the ZnO surface was assumed to be responsible for the frequency upshift. Upon exposure to ethanol (a major environmental crosstalk for traditional acetone sensors), an opposite response (decrease of resonant frequency) was observed. Water was generated and absorbed on the ZnO surface during the ethanol sensing process. Thus, the density of the ZnO film increased, resulting in a frequency drop. FBAR sensor possessed the unique ability to distinguish acetone from ethanol due to their different reaction behaviors.

Original languageEnglish (US)
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Pages1546-1549
Number of pages4
DOIs
StatePublished - Dec 1 2010
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: Nov 1 2010Nov 4 2010

Publication series

NameProceedings of IEEE Sensors

Other

Other9th IEEE Sensors Conference 2010, SENSORS 2010
CountryUnited States
CityWaikoloa, HI
Period11/1/1011/4/10

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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    Qiu, X., Tang, R., Zhu, J., Yu, H., Oiler, J., & Wang, Z. (2010). Acetone sensor based on film bulk acoustic resonator. In IEEE Sensors 2010 Conference, SENSORS 2010 (pp. 1546-1549). [5690310] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2010.5690310