Abstract
Electron-electron and electron-impurity interactions play an important role in ultra-small MOSFETs. Previous simulation approaches (particle-mesh and particle-particle particle-mesh methods) were found to be very time consuming. Here a fast multi-pole method is used instead which was found to yield physically correct results in bulk mobility and device simulations within significantly decreased simulation times. We describe the simulation method and compare the electron mobility for several doping concentrations as obtained experimentally and by five simulation methods.
Original language | English (US) |
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Title of host publication | Proceedings - Electrochemical Society |
Editors | M. Cahay, M. Urquidi-Macdonald, S. Bandyopadhyay, P. Guo, H. Hasegawa, N. Koshida, J.P. Leburton, D.J. Lockwood, S. Seal, A. Stella |
Pages | 165-179 |
Number of pages | 15 |
Volume | PV 2004-13 |
State | Published - 2005 |
Event | Nanoscale Devices, Materials, and Biological Systems: Fundamental and Applications - Proceedings of the International Symposium - Honolulu, HI, United States Duration: Oct 3 2004 → Oct 8 2004 |
Other
Other | Nanoscale Devices, Materials, and Biological Systems: Fundamental and Applications - Proceedings of the International Symposium |
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Country/Territory | United States |
City | Honolulu, HI |
Period | 10/3/04 → 10/8/04 |
ASJC Scopus subject areas
- Engineering(all)