Accuracy and repeatability of automated non-contact probes for on-wafer characterization

Cosan Caglayan; Georgios Trichopoulos; Kubilay Sertel

doi:10.1109/ARFTG.2014.7013406

Accuracy and repeatability of automated non-contact probes for on-wafer characterization

Cosan Caglayan, Georgios Trichopoulos, Kubilay Sertel

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

We present significant performance improvements of non-contact probes for the mmW and sub-mmW device characterization. Repeatability and accuracy of the measurement setup is studied using an automated non-contact probe system and compared with conventional contact-probes. Owing to the planar, non-contact nature of the new setup, only 2-axis automated positioning is required, as compared to typical 3-axis manipulators, including precise contact-force control used in commercially available systems. We demonstrate repeatability studies for the 140-220 GHz band using a precision servo system, which can be fully automated using a software-controlled aligner for wafer-scale measurements. This fully-automated system also allows for periodic re-calibrations that are typically required for reliable sub-mmW measurements.

Original language	English (US)
Title of host publication	84th ARFTG Microwave Measurement Conference: The New Frontiers for Microwave Measurements, ARFTG 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Print)	9781479970841
DOIs	https://doi.org/10.1109/ARFTG.2014.7013406
State	Published - Jan 16 2014
Externally published	Yes
Event	84th ARFTG Microwave Measurement Conference, ARFTG 2014 - Boulder, United States Duration: Dec 4 2014 → Dec 5 2014

Other

Other	84th ARFTG Microwave Measurement Conference, ARFTG 2014
Country/Territory	United States
City	Boulder
Period	12/4/14 → 12/5/14

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1109/ARFTG.2014.7013406

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Accuracy and repeatability of automated non-contact probes for on-wafer characterization. / Caglayan, Cosan; Trichopoulos, Georgios; Sertel, Kubilay.
84th ARFTG Microwave Measurement Conference: The New Frontiers for Microwave Measurements, ARFTG 2014. Institute of Electrical and Electronics Engineers Inc., 2014. 7013406.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Caglayan, C, Trichopoulos, G & Sertel, K 2014, Accuracy and repeatability of automated non-contact probes for on-wafer characterization. in 84th ARFTG Microwave Measurement Conference: The New Frontiers for Microwave Measurements, ARFTG 2014., 7013406, Institute of Electrical and Electronics Engineers Inc., 84th ARFTG Microwave Measurement Conference, ARFTG 2014, Boulder, United States, 12/4/14. https://doi.org/10.1109/ARFTG.2014.7013406

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abstract = "We present significant performance improvements of non-contact probes for the mmW and sub-mmW device characterization. Repeatability and accuracy of the measurement setup is studied using an automated non-contact probe system and compared with conventional contact-probes. Owing to the planar, non-contact nature of the new setup, only 2-axis automated positioning is required, as compared to typical 3-axis manipulators, including precise contact-force control used in commercially available systems. We demonstrate repeatability studies for the 140-220 GHz band using a precision servo system, which can be fully automated using a software-controlled aligner for wafer-scale measurements. This fully-automated system also allows for periodic re-calibrations that are typically required for reliable sub-mmW measurements.",

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Accuracy and repeatability of automated non-contact probes for on-wafer characterization

Abstract

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ASJC Scopus subject areas

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