Accuracy and repeatability of automated non-contact probes for on-wafer characterization

Cosan Caglayan, Georgios Trichopoulos, Kubilay Sertel

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

We present significant performance improvements of non-contact probes for the mmW and sub-mmW device characterization. Repeatability and accuracy of the measurement setup is studied using an automated non-contact probe system and compared with conventional contact-probes. Owing to the planar, non-contact nature of the new setup, only 2-axis automated positioning is required, as compared to typical 3-axis manipulators, including precise contact-force control used in commercially available systems. We demonstrate repeatability studies for the 140-220 GHz band using a precision servo system, which can be fully automated using a software-controlled aligner for wafer-scale measurements. This fully-automated system also allows for periodic re-calibrations that are typically required for reliable sub-mmW measurements.

Original languageEnglish (US)
Title of host publication84th ARFTG Microwave Measurement Conference: The New Frontiers for Microwave Measurements, ARFTG 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781479970841
DOIs
StatePublished - Jan 16 2014
Externally publishedYes
Event84th ARFTG Microwave Measurement Conference, ARFTG 2014 - Boulder, United States
Duration: Dec 4 2014Dec 5 2014

Other

Other84th ARFTG Microwave Measurement Conference, ARFTG 2014
CountryUnited States
CityBoulder
Period12/4/1412/5/14

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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    Caglayan, C., Trichopoulos, G., & Sertel, K. (2014). Accuracy and repeatability of automated non-contact probes for on-wafer characterization. In 84th ARFTG Microwave Measurement Conference: The New Frontiers for Microwave Measurements, ARFTG 2014 [7013406] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ARFTG.2014.7013406