A variable temperature sample stage for the Cameca IMS 3F secondary ion microanalyzer

Steven M. Hues; Peter Williams

doi:10.1116/1.573751

A variable temperature sample stage for the Cameca IMS 3F secondary ion microanalyzer

Steven M. Hues, Peter Williams

Molecular Sciences, School of (SMS)

Research output: Contribution to journal › Comment/debate › peer-review

1 Scopus citations

Original language	English (US)
Pages (from-to)	1942-1943
Number of pages	2
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	4
Issue number	4
DOIs	https://doi.org/10.1116/1.573751
State	Published - Jul 1986

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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title = "A variable temperature sample stage for the Cameca IMS 3F secondary ion microanalyzer",

author = "Hues, {Steven M.} and Peter Williams",

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M3 - Comment/debate

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EP - 1943

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

IS - 4

ER -

A variable temperature sample stage for the Cameca IMS 3F secondary ion microanalyzer

ASJC Scopus subject areas

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