A variable temperature sample stage for the Cameca IMS 3F secondary ion microanalyzer

Steven M. Hues, Peter Williams

Research output: Contribution to journalArticlepeer-review

1 Scopus citations
Original languageEnglish (US)
Pages (from-to)1942-1943
Number of pages2
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume4
Issue number4
DOIs
StatePublished - 1986

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this