A transport equation theory of beam spreading in the electron microscope

Peter Rez

doi:10.1016/0304-3991(83)90302-9

A transport equation theory of beam spreading in the electron microscope

Peter Rez

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Abstract

It has been suggested that the spatial resolution of energy-dispersive analysis in the analytical transmission electron microscope is determined mainly by beam broadening from multiple scattering. The effects of multiple elastic scattering are investigated using the Boltzmann transport equation with the small scattering angle approximation, and various ways of characterising beam broadening are discussed.

Original language	English (US)
Pages (from-to)	29-38
Number of pages	10
Journal	Ultramicroscopy
Volume	12
Issue number	1-2
DOIs	https://doi.org/10.1016/0304-3991(83)90302-9
State	Published - 1983
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Instrumentation

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10.1016/0304-3991(83)90302-9

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title = "A transport equation theory of beam spreading in the electron microscope",

abstract = "It has been suggested that the spatial resolution of energy-dispersive analysis in the analytical transmission electron microscope is determined mainly by beam broadening from multiple scattering. The effects of multiple elastic scattering are investigated using the Boltzmann transport equation with the small scattering angle approximation, and various ways of characterising beam broadening are discussed.",

author = "Peter Rez",

year = "1983",

doi = "10.1016/0304-3991(83)90302-9",

language = "English (US)",

volume = "12",

pages = "29--38",

journal = "Ultramicroscopy",

issn = "0304-3991",

publisher = "Elsevier",

number = "1-2",

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TY - JOUR

T1 - A transport equation theory of beam spreading in the electron microscope

AU - Rez, Peter

PY - 1983

Y1 - 1983

N2 - It has been suggested that the spatial resolution of energy-dispersive analysis in the analytical transmission electron microscope is determined mainly by beam broadening from multiple scattering. The effects of multiple elastic scattering are investigated using the Boltzmann transport equation with the small scattering angle approximation, and various ways of characterising beam broadening are discussed.

AB - It has been suggested that the spatial resolution of energy-dispersive analysis in the analytical transmission electron microscope is determined mainly by beam broadening from multiple scattering. The effects of multiple elastic scattering are investigated using the Boltzmann transport equation with the small scattering angle approximation, and various ways of characterising beam broadening are discussed.

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U2 - 10.1016/0304-3991(83)90302-9

DO - 10.1016/0304-3991(83)90302-9

M3 - Article

AN - SCOPUS:0020878680

SN - 0304-3991

VL - 12

SP - 29

EP - 38

JO - Ultramicroscopy

JF - Ultramicroscopy

IS - 1-2

ER -

A transport equation theory of beam spreading in the electron microscope

Abstract

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