It has been suggested that the spatial resolution of energy-dispersive analysis in the analytical transmission electron microscope is determined mainly by beam broadening from multiple scattering. The effects of multiple elastic scattering are investigated using the Boltzmann transport equation with the small scattering angle approximation, and various ways of characterising beam broadening are discussed.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics