A system identification approach to PDE modeling of a semiconductor manufacturing process

Jay D. Schwartz, Daniel Rivera

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Efficient supply chain management is a crucial imperative for modern, global enterprises. Tactical decision policies based on process control principles have been developed in the literature for managing production-inventory systems and supply chain networks. To be effective these decision policies depend on accurate nominal models. With a discreteevent simulation acting as a "truth model", we employ system identification techniques to parameterize a nonlinear Partial Differential Equation (PDE) model of the semiconductor manufacturing process. A case study shows that the identified PDE model can accurately predict the output of the discrete-event simulation, but without the high computational burden.

Original languageEnglish (US)
Title of host publicationIFAC Proceedings Volumes (IFAC-PapersOnline)
Pages964-969
Number of pages6
Volume15
EditionPART 1
DOIs
StatePublished - 2009
Event15th IFAC Symposium on System Identification, SYSID 2009 - Saint-Malo, France
Duration: Jul 6 2009Jul 8 2009

Other

Other15th IFAC Symposium on System Identification, SYSID 2009
CountryFrance
CitySaint-Malo
Period7/6/097/8/09

Fingerprint

Partial differential equations
Identification (control systems)
Semiconductor materials
Supply chain management
Discrete event simulation
Supply chains
Process control
Industry

Keywords

  • Discrete event simulation
  • Semiconductor manufacturing
  • Simultaneous perturbation stochastic approximation
  • System identification

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Schwartz, J. D., & Rivera, D. (2009). A system identification approach to PDE modeling of a semiconductor manufacturing process. In IFAC Proceedings Volumes (IFAC-PapersOnline) (PART 1 ed., Vol. 15, pp. 964-969) https://doi.org/10.3182/20090706-3-FR-2004.0394

A system identification approach to PDE modeling of a semiconductor manufacturing process. / Schwartz, Jay D.; Rivera, Daniel.

IFAC Proceedings Volumes (IFAC-PapersOnline). Vol. 15 PART 1. ed. 2009. p. 964-969.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Schwartz, JD & Rivera, D 2009, A system identification approach to PDE modeling of a semiconductor manufacturing process. in IFAC Proceedings Volumes (IFAC-PapersOnline). PART 1 edn, vol. 15, pp. 964-969, 15th IFAC Symposium on System Identification, SYSID 2009, Saint-Malo, France, 7/6/09. https://doi.org/10.3182/20090706-3-FR-2004.0394
Schwartz JD, Rivera D. A system identification approach to PDE modeling of a semiconductor manufacturing process. In IFAC Proceedings Volumes (IFAC-PapersOnline). PART 1 ed. Vol. 15. 2009. p. 964-969 https://doi.org/10.3182/20090706-3-FR-2004.0394
Schwartz, Jay D. ; Rivera, Daniel. / A system identification approach to PDE modeling of a semiconductor manufacturing process. IFAC Proceedings Volumes (IFAC-PapersOnline). Vol. 15 PART 1. ed. 2009. pp. 964-969
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