A system identification approach to PDE modeling of a semiconductor manufacturing process

Jay D. Schwartz, Daniel Rivera

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Efficient supply chain management is a crucial imperative for modern, global enterprises. Tactical decision policies based on process control principles have been developed in the literature for managing production-inventory systems and supply chain networks. To be effective these decision policies depend on accurate nominal models. With a discreteevent simulation acting as a "truth model", we employ system identification techniques to parameterize a nonlinear Partial Differential Equation (PDE) model of the semiconductor manufacturing process. A case study shows that the identified PDE model can accurately predict the output of the discrete-event simulation, but without the high computational burden.

Original languageEnglish (US)
Title of host publication15th Symposium on System Identification, SYSID 2009 - Preprints
Pages964-969
Number of pages6
EditionPART 1
DOIs
StatePublished - Dec 1 2009
Event15th IFAC Symposium on System Identification, SYSID 2009 - Saint-Malo, France
Duration: Jul 6 2009Jul 8 2009

Publication series

NameIFAC Proceedings Volumes (IFAC-PapersOnline)
NumberPART 1
Volume15
ISSN (Print)1474-6670

Other

Other15th IFAC Symposium on System Identification, SYSID 2009
CountryFrance
CitySaint-Malo
Period7/6/097/8/09

Keywords

  • Discrete event simulation
  • Semiconductor manufacturing
  • Simultaneous perturbation stochastic approximation
  • System identification

ASJC Scopus subject areas

  • Control and Systems Engineering

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    Schwartz, J. D., & Rivera, D. (2009). A system identification approach to PDE modeling of a semiconductor manufacturing process. In 15th Symposium on System Identification, SYSID 2009 - Preprints (PART 1 ed., pp. 964-969). (IFAC Proceedings Volumes (IFAC-PapersOnline); Vol. 15, No. PART 1). https://doi.org/10.3182/20090706-3-FR-2004.0394