TY - GEN
T1 - A system identification approach to PDE modeling of a semiconductor manufacturing process
AU - Schwartz, Jay D.
AU - Rivera, Daniel
N1 - Funding Information:
⋆ The authors would like to acknowledge support from the National Science Foundation (CMMI-0432439) and the Intel Research Council. Corresponding author Daniel E. Rivera. Telephone (480) 965-9476. Fax (480) 965-0037.
PY - 2009
Y1 - 2009
N2 - Efficient supply chain management is a crucial imperative for modern, global enterprises. Tactical decision policies based on process control principles have been developed in the literature for managing production-inventory systems and supply chain networks. To be effective these decision policies depend on accurate nominal models. With a discreteevent simulation acting as a "truth model", we employ system identification techniques to parameterize a nonlinear Partial Differential Equation (PDE) model of the semiconductor manufacturing process. A case study shows that the identified PDE model can accurately predict the output of the discrete-event simulation, but without the high computational burden.
AB - Efficient supply chain management is a crucial imperative for modern, global enterprises. Tactical decision policies based on process control principles have been developed in the literature for managing production-inventory systems and supply chain networks. To be effective these decision policies depend on accurate nominal models. With a discreteevent simulation acting as a "truth model", we employ system identification techniques to parameterize a nonlinear Partial Differential Equation (PDE) model of the semiconductor manufacturing process. A case study shows that the identified PDE model can accurately predict the output of the discrete-event simulation, but without the high computational burden.
KW - Discrete event simulation
KW - Semiconductor manufacturing
KW - Simultaneous perturbation stochastic approximation
KW - System identification
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U2 - 10.3182/20090706-3-FR-2004.0394
DO - 10.3182/20090706-3-FR-2004.0394
M3 - Conference contribution
AN - SCOPUS:80051623190
SN - 9783902661470
T3 - IFAC Proceedings Volumes (IFAC-PapersOnline)
SP - 964
EP - 969
BT - 15th Symposium on System Identification, SYSID 2009 - Preprints
T2 - 15th IFAC Symposium on System Identification, SYSID 2009
Y2 - 6 July 2009 through 8 July 2009
ER -