TY - GEN
T1 - A solid electrolyte valve for micro/nano-fluidics
AU - Yang, Y.
AU - Zhang, X.
AU - Kozicki, Michael
AU - Chae, Junseok
PY - 2009
Y1 - 2009
N2 - This paper presents a nanovalve that uses electrodeposited nanostructures on a solid-state Ag-Ge-Se electrolyte to regulate liquid flow in micro/nano-fluidic channels. The valve uses the extremely rough surface morphology of electrodeposits to manipulate hydrophobicity, thereby closing and opening the nanovalves. Electrodeposited nanostructures can be grown and retracted on the electrolyte surface by applying voltages between 5V and -20V at room temperature. The nanovalve successfully closes and opens de-ionized water (DI) flow in a 20μm tall and 500μm wide microfluidic channel. Closing and opening a single nanovalve takes 5.3 min and 3 min, respectively, with a power consumption of 0.08 mW and 0.17mW, respectively. A triple nanovalve takes 3.8min and 2.5min to close and open, representing a 28% and 17% decrease in valving time as compared to a single nanovalve.
AB - This paper presents a nanovalve that uses electrodeposited nanostructures on a solid-state Ag-Ge-Se electrolyte to regulate liquid flow in micro/nano-fluidic channels. The valve uses the extremely rough surface morphology of electrodeposits to manipulate hydrophobicity, thereby closing and opening the nanovalves. Electrodeposited nanostructures can be grown and retracted on the electrolyte surface by applying voltages between 5V and -20V at room temperature. The nanovalve successfully closes and opens de-ionized water (DI) flow in a 20μm tall and 500μm wide microfluidic channel. Closing and opening a single nanovalve takes 5.3 min and 3 min, respectively, with a power consumption of 0.08 mW and 0.17mW, respectively. A triple nanovalve takes 3.8min and 2.5min to close and open, representing a 28% and 17% decrease in valving time as compared to a single nanovalve.
KW - MEMS
KW - Nanovalve
KW - Solid-state electrolyte
UR - http://www.scopus.com/inward/record.url?scp=77958049584&partnerID=8YFLogxK
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M3 - Conference contribution
AN - SCOPUS:77958049584
SN - 9781439817834
SN - 9781439817841
T3 - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
SP - 525
EP - 528
BT - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
T2 - Nanotechnology 2009: Biofuels, Renewable Energy, Coatings, Fluidics and Compact Modeling - 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
Y2 - 3 May 2009 through 7 May 2009
ER -