TY - GEN
T1 - A SMART SHAPE MEMORY ALLOY ACTUATED MICROVALVE WITH FEEDBACK CONTROL
AU - Nandakumar, Krishnan
AU - Parr, Allen G.
AU - Hahm, Geon
AU - Huff, Michael A.
AU - Phillips, Stephen M.
N1 - Publisher Copyright:
© 1998 American Society of Mechanical Engineers (ASME). All rights reserved.
PY - 1998
Y1 - 1998
N2 - The microfluidics group at CWRU has demonstrated a thin film shape memory alloy actuated smart microvalve with feedback control for fluid control. A micromachined flow sensor was designed and fabricated and feedback control electronics were developed and incorporated with a TiNi microvalve to realize the system. The valve is a Titanium Nickel (TiNi) Shape Memory Alloy (SMA) thin film actuated micromachined valve capable of modulating 0-250 ml/min of airflow at 2 psi. The flow sensor used is a micromachined, anemometric type flow sensor. By simulation, the smart controller was designed using MATLAB with Simulink and realized with standard integrated circuits. The performance of the smart valve shows flow insensitivity to pressure variations across the valve. This was demonstrated by a constant flow even when the valve is subject to a change in the pressure drop across the valve. This is in contrast to the typical behavior of standard valves without flow sensing and feedback control.
AB - The microfluidics group at CWRU has demonstrated a thin film shape memory alloy actuated smart microvalve with feedback control for fluid control. A micromachined flow sensor was designed and fabricated and feedback control electronics were developed and incorporated with a TiNi microvalve to realize the system. The valve is a Titanium Nickel (TiNi) Shape Memory Alloy (SMA) thin film actuated micromachined valve capable of modulating 0-250 ml/min of airflow at 2 psi. The flow sensor used is a micromachined, anemometric type flow sensor. By simulation, the smart controller was designed using MATLAB with Simulink and realized with standard integrated circuits. The performance of the smart valve shows flow insensitivity to pressure variations across the valve. This was demonstrated by a constant flow even when the valve is subject to a change in the pressure drop across the valve. This is in contrast to the typical behavior of standard valves without flow sensing and feedback control.
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U2 - 10.1115/IMECE1998-1234
DO - 10.1115/IMECE1998-1234
M3 - Conference contribution
AN - SCOPUS:85125012224
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 139
EP - 143
BT - Micro-Electro-Mechanical Systems (MEMS)
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 1998 International Mechanical Engineering Congress and Exposition, IMECE 1998
Y2 - 15 November 1998 through 20 November 1998
ER -