A simplified process flow for silicon heterojunction interdigitated back contact solar cells: Using shadow masks and tunnel junctions

Stanislau Herasimenka; Clarence J. Tracy; William J. Dauksher; Christiana Honsberg; Stuart Bowden

doi:10.1109/PVSC.2014.6925434

A simplified process flow for silicon heterojunction interdigitated back contact solar cells: Using shadow masks and tunnel junctions

Stanislau Herasimenka, Clarence J. Tracy, William J. Dauksher, Christiana Honsberg, Stuart Bowden

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

9 Scopus citations

Abstract

A novel process flow, which can allow the formation of interdigitated p- and n-type a-Si strips and corresponding transparent conductive oxide (TCO) and metal layers for silicon heterojunction interdigitated back contact (SHJ-IBC) solar cells using only a single alignment step and without using any resist patterning is presented. The flow is based on the deposition of a-Si, TCO and metal layers through a stack of shadow masks. Three variation of the flow are described. Several key process components to include a-Si deposition and H₂ plasma etch through the shadow mask are demonstrated and described.

Original language	English (US)
Title of host publication	2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	2486-2490
Number of pages	5
ISBN (Electronic)	9781479943982
DOIs	https://doi.org/10.1109/PVSC.2014.6925434
State	Published - Oct 15 2014
Event	40th IEEE Photovoltaic Specialist Conference, PVSC 2014 - Denver, United States Duration: Jun 8 2014 → Jun 13 2014

Publication series

Name	2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014

Other

Other	40th IEEE Photovoltaic Specialist Conference, PVSC 2014
Country/Territory	United States
City	Denver
Period	6/8/14 → 6/13/14

Keywords

contact formation
interdigitated back contact
silicon heterojunction
solar cell

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/PVSC.2014.6925434

Cite this

Herasimenka, S., Tracy, C. J., Dauksher, W. J., Honsberg, C., & Bowden, S. (2014). A simplified process flow for silicon heterojunction interdigitated back contact solar cells: Using shadow masks and tunnel junctions. In 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014 (pp. 2486-2490). Article 6925434 (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2014.6925434

A simplified process flow for silicon heterojunction interdigitated back contact solar cells: Using shadow masks and tunnel junctions. / Herasimenka, Stanislau; Tracy, Clarence J.; Dauksher, William J. et al.
2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 2486-2490 6925434 (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Herasimenka, S, Tracy, CJ, Dauksher, WJ, Honsberg, C & Bowden, S 2014, A simplified process flow for silicon heterojunction interdigitated back contact solar cells: Using shadow masks and tunnel junctions. in 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014., 6925434, 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014, Institute of Electrical and Electronics Engineers Inc., pp. 2486-2490, 40th IEEE Photovoltaic Specialist Conference, PVSC 2014, Denver, United States, 6/8/14. https://doi.org/10.1109/PVSC.2014.6925434

Herasimenka S, Tracy CJ, Dauksher WJ, Honsberg C, Bowden S. A simplified process flow for silicon heterojunction interdigitated back contact solar cells: Using shadow masks and tunnel junctions. In 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014. Institute of Electrical and Electronics Engineers Inc. 2014. p. 2486-2490. 6925434. (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014). doi: 10.1109/PVSC.2014.6925434

Herasimenka, Stanislau ; Tracy, Clarence J. ; Dauksher, William J. et al. / A simplified process flow for silicon heterojunction interdigitated back contact solar cells : Using shadow masks and tunnel junctions. 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 2486-2490 (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014).

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A simplified process flow for silicon heterojunction interdigitated back contact solar cells: Using shadow masks and tunnel junctions

Abstract

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Keywords

ASJC Scopus subject areas

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