@article{b18edfe5d4bc4854841231cf601b23ba,
title = "A simple electronic aperture for rastered-beam depth profiles",
abstract = "A simple, inexpensive electronic aperture for use in depth profiling with ion microprobes and ion-scattering spectrometers is described. The system derives a gate signal from a photocell which views the center of an oscilloscope display driven by the ion beam raster voltages.",
author = "Peter Williams and Evans, {Charles A.}",
note = "Funding Information: crzkter and the qxxture is apen [3]_ The profiles shown here wxe obtained with a large diameter (16 pm) primary-ion beam, chosen to enhance crater wall efkcts to test the aperture_ The neutml beam-crater wall effects can be -try reduced by using a small diameter (2-3 pm) primary beam. The system described here can he adapted readily to other uses_ (a) Several regions of an inhomogeneous sample can be profiled simultaneously, by using several photocek and a multichannci scaler-For example, the emitter, base, and colktor regions of a single transistor could be simultaneously and independently profxkd-(b) Quantitative measures of the intensities of different parts of an image can be obtained by positioning the photocell at the appropriate pints on the auxitiary display-&) i3y using appropriate m&king techniques, apertures of non-standard shapes may be obtained_ We thank Profeaor K_ Vaidyanathan for providing impIant samples. This ~work was supported in part by National Science Foundation Grants DMR-72-03026and MPS-74-05745",
year = "1976",
month = dec,
doi = "10.1016/0020-7381(76)80092-7",
language = "English (US)",
volume = "22",
pages = "327--331",
journal = "International Journal of Mass Spectrometry and Ion Physics",
issn = "0020-7381",
publisher = "Elsevier",
number = "3-4",
}