A robust polymer microcable structure for flexible devices

Eric Kim; Hongen Tu; Cheng Lv; Hanqing Jiang; Hongyu Yu; Yong Xu

doi:10.1063/1.4788917

A robust polymer microcable structure for flexible devices

Eric Kim, Hongen Tu, Cheng Lv, Hanqing Jiang, Hongyu Yu, Yong Xu

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

This letter reports a parylene cable structure that can significantly increase the robustness of flexible devices based on a silicon-island structure. In our previous work, it has been observed that the flexible cables connecting silicon islands could experience stress concentration at the edge of the silicon islands and fracture the metal traces. To address this issue, a micro cushion structure based on parylene micro-channels is proposed to minimize the stress concentration. This structure also improves the overall mechanical strength of the cables, and provides a simple method to encapsulate metal traces reliably.

Original language	English (US)
Article number	033506
Journal	Applied Physics Letters
Volume	102
Issue number	3
DOIs	https://doi.org/10.1063/1.4788917
State	Published - Jan 21 2013

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.4788917

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@article{f9aa5e43c4ff4f14b9830044551056b3,

title = "A robust polymer microcable structure for flexible devices",

abstract = "This letter reports a parylene cable structure that can significantly increase the robustness of flexible devices based on a silicon-island structure. In our previous work, it has been observed that the flexible cables connecting silicon islands could experience stress concentration at the edge of the silicon islands and fracture the metal traces. To address this issue, a micro cushion structure based on parylene micro-channels is proposed to minimize the stress concentration. This structure also improves the overall mechanical strength of the cables, and provides a simple method to encapsulate metal traces reliably.",

author = "Eric Kim and Hongen Tu and Cheng Lv and Hanqing Jiang and Hongyu Yu and Yong Xu",

note = "Funding Information: This material is based upon work partially supported by the National Science Foundation under Grant Nos. 0747620 and 1028564. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation. The microfabrication was carried out in the nFAB cleanroom at Wayne State University and LNF at University of Michigan, Ann Arbor.",

year = "2013",

month = jan,

day = "21",

doi = "10.1063/1.4788917",

language = "English (US)",

volume = "102",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "3",

}

TY - JOUR

T1 - A robust polymer microcable structure for flexible devices

AU - Kim, Eric

AU - Tu, Hongen

AU - Lv, Cheng

AU - Jiang, Hanqing

AU - Yu, Hongyu

AU - Xu, Yong

N1 - Funding Information: This material is based upon work partially supported by the National Science Foundation under Grant Nos. 0747620 and 1028564. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation. The microfabrication was carried out in the nFAB cleanroom at Wayne State University and LNF at University of Michigan, Ann Arbor.

PY - 2013/1/21

Y1 - 2013/1/21

N2 - This letter reports a parylene cable structure that can significantly increase the robustness of flexible devices based on a silicon-island structure. In our previous work, it has been observed that the flexible cables connecting silicon islands could experience stress concentration at the edge of the silicon islands and fracture the metal traces. To address this issue, a micro cushion structure based on parylene micro-channels is proposed to minimize the stress concentration. This structure also improves the overall mechanical strength of the cables, and provides a simple method to encapsulate metal traces reliably.

AB - This letter reports a parylene cable structure that can significantly increase the robustness of flexible devices based on a silicon-island structure. In our previous work, it has been observed that the flexible cables connecting silicon islands could experience stress concentration at the edge of the silicon islands and fracture the metal traces. To address this issue, a micro cushion structure based on parylene micro-channels is proposed to minimize the stress concentration. This structure also improves the overall mechanical strength of the cables, and provides a simple method to encapsulate metal traces reliably.

UR - http://www.scopus.com/inward/record.url?scp=84872914847&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84872914847&partnerID=8YFLogxK

U2 - 10.1063/1.4788917

DO - 10.1063/1.4788917

M3 - Article

AN - SCOPUS:84872914847

SN - 0003-6951

VL - 102

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 3

M1 - 033506

ER -

A robust polymer microcable structure for flexible devices

Abstract

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