A Quasi-Optical Testbed for Wideband THz On-Wafer Measurements

Research output: Contribution to journalArticle

Abstract

We propose a novel quasi-optical topology to enable ultra-wideband on-wafer characterization in the THz regime. Using quasi-optical components, we implement a highperformance directional coupler and a non-contact probing scheme, to interrogate on-wafer devices and circuits. The use of quasi-optics allows superior signal isolation and wideband operation due to the frequency independent nature of focusing components. Additionally, the simple topology is amenable to integration with photonics-based THz emitters and detectors to enable a true THz testbed for vector measurement capabilities. A proof-of-concept testbed is designed and evaluated in the 300-340 GHz band using free-space and on-wafer measurements. The onwafer characterization of passive devices shows good agreement with simulated results and repeatability of <2% for reflection coefficient magnitude and <4 degrees for phase deviation.

Original languageEnglish (US)
JournalIEEE Transactions on Terahertz Science and Technology
DOIs
StateAccepted/In press - Jan 1 2019

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Testbeds
Topology
wafers
broadband
Directional couplers
topology
phase deviation
Ultra-wideband (UWB)
Photonics
Optics
directional couplers
Detectors
Networks (circuits)
isolation
emitters
photonics
optics
reflectance
detectors

Keywords

  • Antenna measurements
  • Biomedical measurement
  • Detectors
  • Directional couplers
  • Lenses
  • Loss measurement
  • quasi-optical
  • terahertz measurements
  • Topology
  • vector network analyzer

ASJC Scopus subject areas

  • Radiation
  • Electrical and Electronic Engineering

Cite this

@article{7199811089dc48df90c0bb127cf728a0,
title = "A Quasi-Optical Testbed for Wideband THz On-Wafer Measurements",
abstract = "We propose a novel quasi-optical topology to enable ultra-wideband on-wafer characterization in the THz regime. Using quasi-optical components, we implement a highperformance directional coupler and a non-contact probing scheme, to interrogate on-wafer devices and circuits. The use of quasi-optics allows superior signal isolation and wideband operation due to the frequency independent nature of focusing components. Additionally, the simple topology is amenable to integration with photonics-based THz emitters and detectors to enable a true THz testbed for vector measurement capabilities. A proof-of-concept testbed is designed and evaluated in the 300-340 GHz band using free-space and on-wafer measurements. The onwafer characterization of passive devices shows good agreement with simulated results and repeatability of <2{\%} for reflection coefficient magnitude and <4 degrees for phase deviation.",
keywords = "Antenna measurements, Biomedical measurement, Detectors, Directional couplers, Lenses, Loss measurement, quasi-optical, terahertz measurements, Topology, vector network analyzer",
author = "Yiran Cui and Georgios Trichopoulos",
year = "2019",
month = "1",
day = "1",
doi = "10.1109/TTHZ.2019.2894505",
language = "English (US)",
journal = "IEEE Transactions on Terahertz Science and Technology",
issn = "2156-342X",
publisher = "Institute of Electrical and Electronics Engineers Inc.",

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N2 - We propose a novel quasi-optical topology to enable ultra-wideband on-wafer characterization in the THz regime. Using quasi-optical components, we implement a highperformance directional coupler and a non-contact probing scheme, to interrogate on-wafer devices and circuits. The use of quasi-optics allows superior signal isolation and wideband operation due to the frequency independent nature of focusing components. Additionally, the simple topology is amenable to integration with photonics-based THz emitters and detectors to enable a true THz testbed for vector measurement capabilities. A proof-of-concept testbed is designed and evaluated in the 300-340 GHz band using free-space and on-wafer measurements. The onwafer characterization of passive devices shows good agreement with simulated results and repeatability of <2% for reflection coefficient magnitude and <4 degrees for phase deviation.

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