A quasi-optical testbed for terahertz on-wafer device and circuit characterization

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present a novel quasi-optical vector network analyzer (VNA) topology for terahertz (THz) on-wafer measurement and characterization. We combine a frequency-independent quasi-optical topology and on-wafer antenna probes to enable a non-contact, ultra-wideband THz on-wafer testing system. Additionally, the use of optical components allows the use of photonics-based THz emitters and detectors, which also support ultra-wide bandwidths of operation. A proof-of-concept testing setup is built and evaluated in the 300-340 GHz band using on-wafer measurements. The characterization of a passive device shows good agreement with simulation results and verifies the feasibility of the proposed VNA topology.

Original languageEnglish (US)
Title of host publication2019 IEEE International Symposium on Antennas and Propagation and USNC-URSI Radio Science Meeting, APSURSI 2019 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1729-1730
Number of pages2
ISBN (Electronic)9781728106922
DOIs
StatePublished - Jul 2019
Event2019 IEEE International Symposium on Antennas and Propagation and USNC-URSI Radio Science Meeting, APSURSI 2019 - Atlanta, United States
Duration: Jul 7 2019Jul 12 2019

Publication series

Name2019 IEEE International Symposium on Antennas and Propagation and USNC-URSI Radio Science Meeting, APSURSI 2019 - Proceedings

Conference

Conference2019 IEEE International Symposium on Antennas and Propagation and USNC-URSI Radio Science Meeting, APSURSI 2019
CountryUnited States
CityAtlanta
Period7/7/197/12/19

Keywords

  • Quasi-optics
  • Terahertz metrology
  • Vector network analyzer

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Signal Processing
  • Instrumentation

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  • Cite this

    Cui, Y., & Trichopoulos, G. C. (2019). A quasi-optical testbed for terahertz on-wafer device and circuit characterization. In 2019 IEEE International Symposium on Antennas and Propagation and USNC-URSI Radio Science Meeting, APSURSI 2019 - Proceedings (pp. 1729-1730). [8888457] (2019 IEEE International Symposium on Antennas and Propagation and USNC-URSI Radio Science Meeting, APSURSI 2019 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/APUSNCURSINRSM.2019.8888457