TY - GEN
T1 - A quasi-optical testbed for terahertz on-wafer device and circuit characterization
AU - Cui, Yiran
AU - Trichopoulos, Georgios C.
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/7
Y1 - 2019/7
N2 - We present a novel quasi-optical vector network analyzer (VNA) topology for terahertz (THz) on-wafer measurement and characterization. We combine a frequency-independent quasi-optical topology and on-wafer antenna probes to enable a non-contact, ultra-wideband THz on-wafer testing system. Additionally, the use of optical components allows the use of photonics-based THz emitters and detectors, which also support ultra-wide bandwidths of operation. A proof-of-concept testing setup is built and evaluated in the 300-340 GHz band using on-wafer measurements. The characterization of a passive device shows good agreement with simulation results and verifies the feasibility of the proposed VNA topology.
AB - We present a novel quasi-optical vector network analyzer (VNA) topology for terahertz (THz) on-wafer measurement and characterization. We combine a frequency-independent quasi-optical topology and on-wafer antenna probes to enable a non-contact, ultra-wideband THz on-wafer testing system. Additionally, the use of optical components allows the use of photonics-based THz emitters and detectors, which also support ultra-wide bandwidths of operation. A proof-of-concept testing setup is built and evaluated in the 300-340 GHz band using on-wafer measurements. The characterization of a passive device shows good agreement with simulation results and verifies the feasibility of the proposed VNA topology.
KW - Quasi-optics
KW - Terahertz metrology
KW - Vector network analyzer
UR - http://www.scopus.com/inward/record.url?scp=85075239076&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85075239076&partnerID=8YFLogxK
U2 - 10.1109/APUSNCURSINRSM.2019.8888457
DO - 10.1109/APUSNCURSINRSM.2019.8888457
M3 - Conference contribution
AN - SCOPUS:85075239076
T3 - 2019 IEEE International Symposium on Antennas and Propagation and USNC-URSI Radio Science Meeting, APSURSI 2019 - Proceedings
SP - 1729
EP - 1730
BT - 2019 IEEE International Symposium on Antennas and Propagation and USNC-URSI Radio Science Meeting, APSURSI 2019 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2019 IEEE International Symposium on Antennas and Propagation and USNC-URSI Radio Science Meeting, APSURSI 2019
Y2 - 7 July 2019 through 12 July 2019
ER -